GA05141_0702 - 09/2004
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Description
1 Description
1.1 System overview
The Leybold MAG pumping system consists of:
■ The MAG turbo pump
The MAG are turbomolecular pumps utilizing magnetic bearings.They
are designed to evacuate vacuum chambers down to pressure values
in the high-vacuum range and to pump high gas throughputs.
The versions without letter behind the number are designed for
clean applications only.
The C versions have a coated rotor and are designed for clean or light
corrosive applications.
The CT versions are additionally equipped with a temperature
management system (TMS) to control the pump temperature. They are
prepared for use in medium to harsh corrosive applications.
The pumps are available with 2 different rotors:
MAG version: Turbo pump
MAG W version: Turbo pump stages and an active drag stage.
See table “Pump configuration” for an overview on the available models.
■ The MAG.DRIVE
digital
frequency converter
The electronic converter converts the single-phase line supply voltage
into a three-phase DC voltage to drive the pump motor. It also evalua-
tes measured signals and controls
- the pump functions
- the temperature management system (TMS) and
- the active magnetic bearing system
The MAG.DRIVE
digital
can be operated with the START and STOP keys,
via a plug-in control, or via a network interface.
■ A cable set consisting of:
- DRIVE/BEARING cable
- TMS or Purge/Vent cable if required
MAG ... C ... CT
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