GA05141_0702 - 09/2004
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Maintenance
4 Maintenance
4.1 Cleaning
If required clean the turbomolecular pump and the frequency converter of
dust with a dry cloth.
4.2 Changing the rotor
The rotor has to be changed at the latest
■ after 40,000 hours of operation or
■ after 5000 starts/stops or cycles
Refer also to Section “3.4 Operation at high gas throughput or high foreva-
cuum pressure”.
Due to high-speed and temperature, the service life of the rotor is
limited.
If the rotor is changed too late, it may be destroyed. Thus in the
flange mounts high forces and torque conditions can occur.
The mounting screws for the pump may be torn off. When
using clamped flange connections at the housing or with compo-
nents above the housing, sudden twisting of the entire pump can
be experienced.
The pump’s operating hours are displayed at the frequency converter (see
Sectiont 3.10.2 ).
A warning message appears after 37,000 hours of operation and after
3700 starts/stops or cycles.
Only the Leybold service can change the rotor.
4.3 Changing the touch-down
bearings
Wear occurs at the touch-down bearings when hard shocks have to be
supported.
Maintenance is also required after removing the bearing cable during ope-
ration of the pump. Under these conditions the rotor can not be controlled
by the magnet bearing and the pump will have a full run down on the touch-
down bearing.
Only the Leybold service can change the touch-down bearings.
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