GA05141_0702 - 09/2004
71
Operation
3.5 Bakeout
Only for pumps with CF flange
If pressures in the range of 10
-8
mbar or below are to be developed, the
vacuum chamber and the components installed therein will have to be
baked out.
Protect the rotor against intensive, direct heat radiation. When baking out
at the forevacuum side – at a sorption trap, for example – ensure that the
components attached direct are not heated to more than 80 °C.
The forevacuum pump must be in operation so as to eliminate the vapors
liberated at the sorption trap.
The maximum bakeout temperature of the pump is 120 °C.
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