MKS 902B - Page 27

902B Abs Piezo Operation manual
27
Analog Output calibration = 2 (Log10)
P (Torr) = 10
Vout/2-2
V
out
= 2*(log(P (Torr))+2)
Torr
mbar
Pascal
V
out
Power Off
0.0000
1.00E-01
1.33E-01
1.33E+01
2.0000
2.00E-01
2.66E-01
2.66E+01
2.6021
3.00E-01
3.99E-01
3.99E+01
2.9542
4.00E-01
5.32E-01
5.32E+01
3.2041
5.00E-01
6.65E-01
6.65E+01
3.3979
6.00E-01
7.98E-01
7.98E+01
3.5563
7.00E-01
9.31E-01
9.31E+01
3.6902
8.00E-01
1.06E+00
1.06E+02
3.8062
9.00E-01
1.20E+00
1.20E+02
3.9085
1.00E+00
1.33E+00
1.33E+02
4.0000
2.00E+00
2.66E+00
2.66E+02
4.6021
3.00E+00
3.99E+00
3.99E+02
4.9542
4.00E+00
5.32E+00
5.32E+02
5.2041
5.00E+00
6.65E+00
6.65E+02
5.3979
6.00E+00
7.98E+00
7.98E+02
5.5563
7.00E+00
9.31E+00
9.31E+02
5.6902
8.00E+00
1.06E+01
1.06E+03
5.8062
9.00E+00
1.20E+01
1.20E+03
5.9085
1.00E+01
1.33E+01
1.33E+03
6.0000
2.00E+01
2.66E+01
2.66E+03
6.6021
3.00E+01
3.99E+01
3.99E+03
6.9542
4.00E+01
5.32E+01
5.32E+03
7.2041
5.00E+01
6.65E+01
6.65E+03
7.3979
6.00E+01
7.98E+01
7.98E+03
7.5563
7.00E+01
9.31E+01
9.31E+03
7.6902
8.00E+01
1.06E+02
1.06E+04
7.8062
9.00E+01
1.20E+02
1.20E+04
7.9085
1.00E+02
1.33E+02
1.33E+04
8.0000
2.00E+02
2.66E+02
2.66E+04
8.6021
3.00E+02
3.99E+02
3.99E+04
8.9542
4.00E+02
5.32E+02
5.32E+04
9.2041
5.00E+02
6.65E+02
6.65E+04
9.3979
6.00E+02
7.98E+02
7.98E+04
9.5563
7.00E+02
9.31E+02
9.31E+04
9.6902
8.00E+02
1.06E+03
1.06E+05
9.8062
9.00E+02
1.20E+03
1.20E+05
9.9085
1.00E+03
1.33E+03
1.33E+05
10.0000