MKS 902B - Page 26

902B Abs Piezo Operation manual
26
Analog Output calibration = 1 (Linear5)
P (Torr) = V
out
×200
V
out
= P (Torr) / 200
Torr
mbar
Pascal
V
out
Power Off
0.0000
1.00E-01
1.33E-01
1.33E+01
0.0005
2.00E-01
2.66E-01
2.66E+01
0.0010
3.00E-01
3.99E-01
3.99E+01
0.0015
4.00E-01
5.32E-01
5.32E+01
0.0020
5.00E-01
6.65E-01
6.65E+01
0.0025
6.00E-01
7.98E-01
7.98E+01
0.0030
7.00E-01
9.31E-01
9.31E+01
0.0035
8.00E-01
1.06E+00
1.06E+02
0.0040
9.00E-01
1.20E+00
1.20E+02
0.0045
1.00E+00
1.33E+00
1.33E+02
0.0050
2.00E+00
2.66E+00
2.66E+02
0.0100
3.00E+00
3.99E+00
3.99E+02
0.0150
4.00E+00
5.32E+00
5.32E+02
0.0200
5.00E+00
6.65E+00
6.65E+02
0.0250
6.00E+00
7.98E+00
7.98E+02
0.0300
7.00E+00
9.31E+00
9.31E+02
0.0350
8.00E+00
1.06E+01
1.06E+03
0.0400
9.00E+00
1.20E+01
1.20E+03
0.0450
1.00E+01
1.33E+01
1.33E+03
0.0500
2.00E+01
2.66E+01
2.66E+03
0.1000
3.00E+01
3.99E+01
3.99E+03
0.1500
4.00E+01
5.32E+01
5.32E+03
0.2000
5.00E+01
6.65E+01
6.65E+03
0.2500
6.00E+01
7.98E+01
7.98E+03
0.3000
7.00E+01
9.31E+01
9.31E+03
0.3500
8.00E+01
1.06E+02
1.06E+04
0.4000
9.00E+01
1.20E+02
1.20E+04
0.4500
1.00E+02
1.33E+02
1.33E+04
0.5000
2.00E+02
2.66E+02
2.66E+04
1.0000
3.00E+02
3.99E+02
3.99E+04
1.5000
4.00E+02
5.32E+02
5.32E+04
2.0000
5.00E+02
6.65E+02
6.65E+04
2.5000
6.00E+02
7.98E+02
7.98E+04
3.0000
7.00E+02
9.31E+02
9.31E+04
3.5000
8.00E+02
1.06E+03
1.06E+05
4.0000
9.00E+02
1.20E+03
1.20E+05
4.5000
1.00E+03
1.33E+03
1.33E+05
5.0000