MKS 902B - Page 30

902B Abs Piezo Operation manual
30
Analog output calibration = 5 (linear 100 mV/Torr from 0-100 Torr)
Provides a linear analog output with 100 mV/Torr in the range 0-100 Torr. The analog output from 100-1000
Torr is at a constant value of 10 VDC.
P
Torr
= 10×V
out
V
out
= 0.1×P
Torr
Torr
mbar
Pascal
V
out
0
0
0,00E+00
0
10
13,3
1,33E+03
1
20
26,6
2,66E+03
2
30
39,9
3,99E+03
3
40
53,2
5,32E+03
4
50
66,5
6,65E+03
5
60
79,8
7,98E+03
6
70
93,1
9,31E+03
7
80
106,4
1,06E+04
8
90
119,7
1,20E+04
9
100
133
1,33E+04
10
1000
1330
1,33E+05
10
Analog output calibration = 6 (linear 1-9.8 VDC)
Provides a linear analog output in the range 0-825 Torr. The analog output from 825-1000 Torr is at a
constant value of 9.8 VDC.
P
Torr
= 93,763×(V
out
– 1) V
out
= 1+1.067×10
-2
×P
Torr
Torr
mbar
Pascal
V
out
0
0
0,00E+00
1,00
100
133
1,33E+04
2,07
200
266
2,66E+04
3,13
300
399
3,99E+04
4,20
400
532
5,32E+04
5,27
500
665
6,65E+04
6,33
600
798
7,98E+04
7,40
700
931
9,31E+04
8,47
800
1064
1,06E+05
9,53
825
1097
1,10E+05
9,80
1000
1330
1,33E+05
9,80