MKS 902B - Page 31

902B Abs Piezo Operation manual
31
Analog output calibration = 7 (MKS GP275 emulation)
The GP275 emulation provides a strongly non-linear output with very poor resolution in the low range and
close to atmospheric pressure.
Torr
mbar
Pascal
V
out
1.00E-05
1.33E-05
1.33E-03
0.372
1.00E-04
1.33E-04
1.33E-02
0.372
2.50E-04
3.33E-04
3.33E-02
0.376
5.00E-04
6.67E-04
6.67E-02
0.381
7.50E-04
1.00E-03
1.00E-01
0.385
1.00E-03
1.33E-03
1.33E-01
0.388
2.50E-03
3.33E-03
3.33E-01
0.406
5.00E-03
6.67E-03
6.67E-01
0.431
7.50E-03
1.00E-02
1.00E+00
0.452
1.00E-02
1.33E-02
1.33E+00
0.470
2.50E-02
3.33E-02
3.33E+00
0.563
5.00E-02
6.67E-02
6.67E+00
0.682
7.50E-02
1.00E-01
1.00E+01
0.780
1.00E-01
1.33E-01
1.33E+01
0.867
2.50E-01
3.33E-01
3.33E+01
1.255
5.00E-01
6.67E-01
6.67E+01
1.684
7.50E-01
1.00E+00
1.00E+02
1.990
1.00E+00
1.33E+00
1.33E+02
2.228
2.50E+00
3.33E+00
3.33E+02
3.053
5.00E+00
6.67E+00
6.67E+02
3.664
7.50E+00
1.00E+01
1.00E+03
3.986
1.00E+01
1.33E+01
1.33E+03
4.191
2.50E+01
3.33E+01
3.33E+03
4.706
5.00E+01
6.67E+01
6.67E+03
4.965
7.50E+01
1.00E+02
1.00E+04
5.075
1.00E+02
1.33E+02
1.33E+04
5.137
2.50E+02
3.33E+02
3.33E+04
5.274
5.00E+02
6.67E+02
6.67E+04
5.333
6.00E+02
8.00E+02
8.00E+04
5.345
7.00E+02
9.33E+02
9.33E+04
5.353
7.60E+02
1.01E+03
1.01E+05
5.357
8.00E+02
1.07E+03
1.07E+05
5.360