MKS 902B - Page 32

902B Abs Piezo Operation manual
32
Analog output calibration = 8 (MKS Moducell 325)
The Moducell emulation provides a strongly non-linear output.
Torr
mbar
Pascal
V
out
1.00E-05
1.33E-05
1.33E-03
0.2509
1.00E-04
1.33E-04
1.33E-02
0.2524
2.50E-04
3.33E-04
3.33E-02
0.2550
5.00E-04
6.67E-04
6.67E-02
0.2592
7.50E-04
1.00E-03
1.00E-01
0.2633
1.00E-03
1.33E-03
1.33E-01
0.2674
2.50E-03
3.33E-03
3.33E-01
0.2905
5.00E-03
6.67E-03
6.67E-01
0.3251
7.50E-03
1.00E-02
1.00E+00
0.3561
1.00E-02
1.33E-02
1.33E+00
0.3845
2.50E-02
3.33E-02
3.33E+00
0.5215
5.00E-02
6.67E-02
6.67E+00
0.6868
7.50E-02
1.00E-01
1.00E+01
0.8144
1.00E-01
1.33E-01
1.33E+01
0.9205
2.50E-01
3.33E-01
3.33E+01
1.3489
5.00E-01
6.67E-01
6.67E+01
1.7504
7.50E-01
1.00E+00
1.00E+02
1.9986
1.00E+00
1.33E+00
1.33E+02
2.1720
2.50E+00
3.33E+00
3.33E+02
2.6512
5.00E+00
6.67E+00
6.67E+02
2.9012
7.50E+00
1.00E+01
1.00E+03
3.0022
1.00E+01
1.33E+01
1.33E+03
3.0569
2.50E+01
3.33E+01
3.33E+03
3.1639
5.00E+01
6.67E+01
6.67E+03
3.2023
7.50E+01
1.00E+02
1.00E+04
3.2154
1.00E+02
1.33E+02
1.33E+04
3.2221
2.50E+02
3.33E+02
3.33E+04
3.2342
5.00E+02
6.67E+02
6.67E+04
3.2382
6.00E+02
8.00E+02
8.00E+04
3.2389
7.00E+02
9.33E+02
9.33E+04
3.2394
7.60E+02
1.01E+03
1.01E+05
3.2396
8.00E+02
1.07E+03
1.07E+05
3.2398
Analog out calibration = 9 (MKS Moducell 325, amplified three times)
The Moducell x3 emulation is in curve form identical with the standard Moducell, however, to provide better
signal resolution the signal is amplified by a factor of three.
Torr
mbar
Pascal
V
out
1.00E-05
1.33E-05
1.33E-03
0.753
1.00E-04
1.33E-04
1.33E-02
0.757
2.50E-04
3.33E-04
3.33E-02
0.765
5.00E-04
6.67E-04
6.67E-02
0.778
7.50E-04
1.00E-03
1.00E-01
0.790
1.00E-03
1.33E-03
1.33E-01
0.802
2.50E-03
3.33E-03
3.33E-01
0.871
5.00E-03
6.67E-03
6.67E-01
0.975
7.50E-03
1.00E-02
1.00E+00
1.068
1.00E-02
1.33E-02
1.33E+00
1.154
2.50E-02
3.33E-02
3.33E+00
1.565
5.00E-02
6.67E-02
6.67E+00
2.060
7.50E-02
1.00E-01
1.00E+01
2.443
1.00E-01
1.33E-01
1.33E+01
2.762
2.50E-01
3.33E-01
3.33E+01
4.047
5.00E-01
6.67E-01
6.67E+01
5.251
7.50E-01
1.00E+00
1.00E+02
5.996
1.00E+00
1.33E+00
1.33E+02
6.516
2.50E+00
3.33E+00
3.33E+02
7.954
5.00E+00
6.67E+00
6.67E+02
8.704
7.50E+00
1.00E+01
1.00E+03
9.007
1.00E+01
1.33E+01
1.33E+03
9.171
2.50E+01
3.33E+01
3.33E+03
9.492
5.00E+01
6.67E+01
6.67E+03
9.607
7.50E+01
1.00E+02
1.00E+04
9.646
1.00E+02
1.33E+02
1.33E+04
9.666
2.50E+02
3.33E+02
3.33E+04
9.702
5.00E+02
6.67E+02
6.67E+04
9.715
6.00E+02
8.00E+02
8.00E+04
9.717
7.00E+02
9.33E+02
9.33E+04
9.718
7.60E+02
1.01E+03
1.01E+05
9.719
8.00E+02
1.07E+03
1.07E+05
9.719