MKS 902B - Page 45

902B Abs Piezo Operation manual
45
Analog output calibration = 31 (Varian Eysys)
Torr
mbar
Pascal
V
out
1.00E-04
1.33E-04
1.33E-02
1
1.00E-03
1.33E-03
1.33E-01
2
1.00E-02
1.33E-02
1.33E+00
3
1.00E-01
1.33E-01
1.33E+01
4
1.00E+00
1.33E+00
1.33E+02
5
1.00E+01
1.33E+01
1.33E+03
6
1.00E+02
1.33E+02
1.33E+04
7
1.00E+03
1.33E+03
1.33E+05
8
Analog output calibration = 32 (Alcatel TA111)
Torr
mbar
Pascal
V
out
1.50E-03
2.00E-03
2.00E-01
0.1
2.25E-03
3.00E-03
3.00E-01
0.2
3.00E-03
4.00E-03
4.00E-01
0.3
3.75E-03
5.00E-03
5.00E-01
0.4
4.50E-03
6.00E-03
6.00E-01
0.5
5.25E-03
7.00E-03
7.00E-01
0.6
6.00E-03
8.00E-03
8.00E-01
0.7
6.75E-03
9.00E-03
9.00E-01
0.8
7.50E-03
1.00E-02
1.00E+00
0.9
8.25E-03
1.10E-02
1.10E+00
1
1.50E-02
2.00E-02
2.00E+00
1.8
2.25E-02
3.00E-02
3.00E+00
2.5
3.00E-02
4.00E-02
4.00E+00
3.15
3.75E-02
5.00E-02
5.00E+00
3.65
4.50E-02
6.00E-02
6.00E+00
4.1
5.25E-02
7.00E-02
7.00E+00
4.5
6.00E-02
8.00E-02
8.00E+00
4.85
6.75E-02
9.00E-02
9.00E+00
5.15
7.50E-02
1.00E-01
1.00E+01
5.4
1.50E-01
2.00E-01
2.00E+01
6.95
2.25E-01
3.00E-01
3.00E+01
7.7
3.00E-01
4.00E-01
4.00E+01
8.1
3.75E-01
5.00E-01
5.00E+01
8.4
4.50E-01
6.00E-01
6.00E+01
8.6
5.25E-01
7.00E-01
7.00E+01
8.75
7.50E-01
1.00E+00
1.00E+02
9
1.50E+00
2.00E+00
2.00E+02
9.2
2.25E+00
3.00E+00
3.00E+02
9.2
Analog output calibration = 33 (MKS 685)
P = 10
(Vout – 4)
V
out
= 4 + log
10
(P)
Torr
mbar
Pascal
V
out
1.00E-05
1.33E-05
1.33E-03
1.00
1.00E-04
1.33E-04
1.33E-02
1.00
1.00E-03
1.33E-03
1.33E-01
1.00
1.00E-02
1.33E-02
1.33
2.00
1.00E-01
1.33E-01
13.3
3.00
1.00
1.33
133.3
4.00
10.0
13.3
1333.2
5.00
100
133.3
1.33E+04
6.00
1000
1333.2
1.33E+05
7.00