MKS 902B - Page 44

902B Abs Piezo Operation manual
44
Analog output calibration = 29 (K6080)
Torr
mbar
Pascal
V
out
7.50E-06
1.00E-05
1.00E-03
0.4
3.75E-05
5.00E-05
5.00E-03
0.4
7.50E-05
1.00E-04
1.00E-02
0.4
3.00E-04
4.00E-04
4.00E-02
0.4
6.00E-04
8.00E-04
8.00E-02
0.4
7.50E-04
1.00E-03
1.00E-01
0.41
3.00E-03
4.00E-03
4.00E-01
0.48
3.75E-03
5.00E-03
5.00E-01
0.5
6.75E-03
9.00E-03
9.00E-01
0.55
1.50E-02
2.00E-02
2.00E+00
0.61
3.75E-02
5.00E-02
5.00E+00
0.79
4.13E-02
5.50E-02
5.50E+00
1.1
4.50E-02
6.00E-02
6.00E+00
1.37
6.00E-02
8.00E-02
8.00E+00
1.6
7.50E-02
1.00E-01
1.00E+01
1.83
1.50E-01
2.00E-01
2.00E+01
2.64
2.60E-01
3.47E-01
3.47E+01
3.2
4.12E-01
5.50E-01
5.50E+01
3.71
5.31E-01
7.08E-01
7.08E+01
4
7.50E-01
1.00E+00
1.00E+02
4.45
1.14E+00
1.51E+00
1.51E+02
5
1.72E+00
2.29E+00
2.29E+02
5.44
3.00E+00
4.00E+00
4.00E+02
6.12
4.50E+00
6.00E+00
6.00E+02
6.8
4.88E+00
6.50E+00
6.50E+02
7.4
5.25E+00
7.00E+00
7.00E+02
7.96
6.00E+00
8.00E+00
8.00E+02
8.5
7.50E+00
1.00E+01
1.00E+03
9.01
1.50E+01
2.00E+01
2.00E+03
9.45
3.00E+01
4.00E+01
4.00E+03
9.7
4.50E+01
6.00E+01
6.00E+03
9.78
7.50E+01
1.00E+02
1.00E+04
9.85
1.50E+02
2.00E+02
2.00E+04
9.92
3.00E+02
4.00E+02
4.00E+04
9.95
4.50E+02
6.00E+02
6.00E+04
9.96
6.00E+02
8.00E+02
8.00E+04
9.98
7.60E+02
1.00E+03
1.00E+05
10
Analog output calibration = 30 (Inficon PEG100)
Torr
mbar
Pascal
V
out
1.00E-08
1.33E-08
1.33E-06
2.186111
1.00E-07
1.33E-07
1.33E-05
3.516111
1.00E-06
1.33E-06
1.33E-04
4.846111
1.00E-05
1.33E-05
1.33E-03
6.176111
1.00E-04
1.33E-04
1.33E-02
7.506111
5.00E-04
6.67E-04
6.67E-02
8.435741
1.00E-03
1.33E-03
1.33E-01
8.836111
1.00E-02
1.33E-02
1.33E+00
10.16611