MKS 902B - Page 43

902B Abs Piezo Operation manual
43
Analog output calibration = 28 (MKS 907)
Torr
mbar
Pascal
V
out
7.50E-04
1.00E-03
1.00E-01
0.387
1.50E-03
2.00E-03
2.00E-01
0.397
3.00E-03
4.00E-03
4.00E-01
0.418
4.50E-03
6.00E-03
6.00E-01
0.437
6.00E-03
8.00E-03
8.00E-01
0.456
7.50E-03
1.00E-02
1.00E+00
0.473
1.50E-02
2.00E-02
2.00E+00
0.551
2.25E-02
3.00E-02
3.00E+00
0.619
3.00E-02
4.00E-02
4.00E+00
0.679
3.75E-02
5.00E-02
5.00E+00
0.733
4.50E-02
6.00E-02
6.00E+00
0.783
5.25E-02
7.00E-02
7.00E+00
0.83
6.00E-02
8.00E-02
8.00E+00
0.874
6.75E-02
9.00E-02
9.00E+00
0.915
7.50E-02
1.00E-01
1.00E+01
0.955
1.50E-01
2.00E-01
2.00E+01
1.271
2.25E-01
3.00E-01
3.00E+01
1.508
3.00E-01
4.00E-01
4.00E+01
1.701
3.75E-01
5.00E-01
5.00E+01
1.864
4.50E-01
6.00E-01
6.00E+01
2.007
5.25E-01
7.00E-01
7.00E+01
2.133
6.00E-01
8.00E-01
8.00E+01
2.246
6.75E-01
9.00E-01
9.00E+01
2.348
7.50E-01
1.00E+00
1.00E+02
2.442
1.50E+00
2.00E+00
2.00E+02
3.083
2.25E+00
3.00E+00
3.00E+02
3.452
3.00E+00
4.00E+00
4.00E+02
3.698
3.75E+00
5.00E+00
5.00E+02
3.875
4.50E+00
6.00E+00
6.00E+02
4.009
5.25E+00
7.00E+00
7.00E+02
4.114
6.00E+00
8.00E+00
8.00E+02
4.198
6.75E+00
9.00E+00
9.00E+02
4.268
7.50E+00
1.00E+01
1.00E+03
4.327
1.50E+01
2.00E+01
2.00E+03
4.627
1.88E+01
2.50E+01
2.50E+03
4.695
2.25E+01
3.00E+01
3.00E+03
4.743
3.00E+01
4.00E+01
4.00E+03
4.805
3.75E+01
5.00E+01
5.00E+03
4.843
4.50E+01
6.00E+01
6.00E+03
4.872
5.25E+01
7.00E+01
7.00E+03
4.891
5.63E+01
7.50E+01
7.50E+03
4.898
6.00E+01
8.00E+01
8.00E+03
4.904
6.75E+01
9.00E+01
9.00E+03
4.914
7.50E+01
1.00E+02
1.00E+04
4.923
1.50E+02
2.00E+02
2.00E+04
4.987
1.88E+02
2.50E+02
2.50E+04
5.025
2.25E+02
3.00E+02
3.00E+04
5.071
3.00E+02
4.00E+02
4.00E+04
5.183
3.75E+02
5.00E+02
5.00E+04
5.301
4.50E+02
6.00E+02
6.00E+04
5.397
5.25E+02
7.00E+02
7.00E+04
5.478
5.63E+02
7.50E+02
7.50E+04
5.514
6.00E+02
8.00E+02
8.00E+04
5.548
6.75E+02
9.00E+02
9.00E+04
5.61
7.60E+02
1.00E+03
1.00E+05
5.666