MKS 902B - Page 42

902B Abs Piezo Operation manual
42
Analog output calibration = 27 (Edwards APG100-M)
The APG100-M emulation provides a strongly non-linear output with limited resolution in the low range and
close to atmospheric pressure
Torr
mbar
Pascal
V
out
7.50E-05
1.00E-04
1.00E-02
2
1.73E-04
2.31E-04
2.31E-02
2.05
4.66E-04
6.21E-04
6.21E-02
2.1
1.02E-03
1.36E-03
1.36E-01
2.2
2.23E-03
2.97E-03
2.97E-01
2.4
3.46E-03
4.61E-03
4.61E-01
2.6
4.88E-03
6.51E-03
6.51E-01
2.8
7.65E-03
1.02E-02
1.02E+00
3
1.10E-02
1.47E-02
1.47E+00
3.2
1.43E-02
1.91E-02
1.91E+00
3.4
2.21E-02
2.95E-02
2.95E+00
3.6
3.12E-02
4.16E-02
4.16E+00
3.8
4.21E-02
5.61E-02
5.61E+00
4
5.40E-02
7.20E-02
7.20E+00
4.2
6.71E-02
8.94E-02
8.94E+00
4.4
8.48E-02
1.13E-01
1.13E+01
4.6
1.09E-01
1.45E-01
1.45E+01
4.8
1.32E-01
1.76E-01
1.76E+01
5
1.67E-01
2.22E-01
2.22E+01
5.2
2.37E-01
3.16E-01
3.16E+01
5.4
3.10E-01
4.13E-01
4.13E+01
5.6
4.05E-01
5.40E-01
5.40E+01
5.8
5.12E-01
6.82E-01
6.82E+01
6
6.31E-01
8.41E-01
8.41E+01
6.2
7.95E-01
1.06E+00
1.06E+02
6.4
9.98E-01
1.33E+00
1.33E+02
6.6
1.20E+00
1.60E+00
1.60E+02
6.8
1.40E+00
1.87E+00
1.87E+02
7
1.70E+00
2.26E+00
2.26E+02
7.2
2.06E+00
2.75E+00
2.75E+02
7.4
2.43E+00
3.24E+00
3.24E+02
7.6
2.80E+00
3.73E+00
3.73E+02
7.8
3.29E+00
4.39E+00
4.39E+02
8
3.97E+00
5.29E+00
5.29E+02
8.2
4.70E+00
6.27E+00
6.27E+02
8.4
5.72E+00
7.63E+00
7.63E+02
8.6
7.04E+00
9.39E+00
9.39E+02
8.8
9.53E+00
1.27E+01
1.27E+03
9
1.25E+01
1.67E+01
1.67E+03
9.2
1.68E+01
2.24E+01
2.24E+03
9.4
2.16E+01
2.88E+01
2.88E+03
9.5
2.65E+01
3.53E+01
3.53E+03
9.6
3.36E+01
4.48E+01
4.48E+03
9.7
4.99E+01
6.65E+01
6.65E+03
9.8
1.06E+02
1.41E+02
1.41E+04
9.9
4.62E+02
6.16E+02
6.16E+04
9.95
7.60E+02
1.00E+03
1.00E+05
10