MKS 902B - Page 41

902B Abs Piezo Operation manual
41
Analog output calibration = 26 (Edwards APG100-LC)
The APG100-L emulation provides a strongly nonlinear output with limited resolution in the low range and
close to atmospheric pressure.
Torr
mbar
Pascal
V
out
7.50E-06
1.00E-05
1.00E-03
2
1.70E-04
2.27E-04
2.27E-02
2.1
3.75E-04
5.00E-04
5.00E-02
2.2
8.10E-04
1.08E-03
1.08E-01
2.4
1.26E-03
1.68E-03
1.68E-01
2.6
1.95E-03
2.60E-03
2.60E-01
2.8
2.88E-03
3.84E-03
3.84E-01
3
3.86E-03
5.15E-03
5.15E-01
3.2
5.15E-03
6.87E-03
6.87E-01
3.4
7.88E-03
1.05E-02
1.05E+00
3.6
1.17E-02
1.56E-02
1.56E+00
3.8
1.58E-02
2.10E-02
2.10E+00
4
2.08E-02
2.77E-02
2.77E+00
4.2
2.59E-02
3.45E-02
3.45E+00
4.4
3.12E-02
4.16E-02
4.16E+00
4.6
3.78E-02
5.04E-02
5.04E+00
4.8
4.44E-02
5.92E-02
5.92E+00
5
6.56E-02
8.74E-02
8.74E+00
5.2
9.53E-02
1.27E-01
1.27E+01
5.4
1.28E-01
1.71E-01
1.71E+01
5.6
1.67E-01
2.23E-01
2.23E+01
5.8
2.18E-01
2.90E-01
2.90E+01
6
2.68E-01
3.57E-01
3.57E+01
6.2
3.26E-01
4.35E-01
4.35E+01
6.4
4.00E-01
5.33E-01
5.33E+01
6.6
4.80E-01
6.40E-01
6.40E+01
6.8
5.75E-01
7.67E-01
7.67E+01
7
6.92E-01
9.23E-01
9.23E+01
7.2
8.55E-01
1.14E+00
1.14E+02
7.4
1.05E+00
1.40E+00
1.40E+02
7.6
1.25E+00
1.66E+00
1.66E+02
7.8
1.44E+00
1.92E+00
1.92E+02
8
1.79E+00
2.38E+00
2.38E+02
8.2
2.21E+00
2.95E+00
2.95E+02
8.4
2.63E+00
3.51E+00
3.51E+02
8.6
3.13E+00
4.17E+00
4.17E+02
8.8
4.05E+00
5.40E+00
5.40E+02
9
5.30E+00
7.06E+00
7.06E+02
9.2
7.27E+00
9.69E+00
9.69E+02
9.4
9.68E+00
1.29E+01
1.29E+03
9.5
1.25E+01
1.66E+01
1.66E+03
9.6
1.55E+01
2.07E+01
2.07E+03
9.7
2.54E+01
3.39E+01
3.39E+03
9.8
4.74E+01
6.32E+01
6.32E+03
9.9
1.08E+02
1.44E+02
1.44E+04
9.95
7.60E+02
1.00E+03
1.00E+05
10