MKS 902B - Page 40

902B Abs Piezo Operation manual
40
Analog output calibration = 24 (Thyracont MT241.1-5)
The MT241 emulation provides a strongly nonlinear output with limited resolution in the low range and close
to atmospheric pressure.
Torr
mbar
Pascal
V
out
7.50E-4
1.00E-03
1.00E-01
0.41
3.00E-3
4.00E-03
4.00E-01
0.48
3.75E-3
5.00E-03
5.00E-01
0.5
6.00E-3
8.00E-03
8.00E-01
0.55
7.50E-3
1.00E-02
1.00E+00
0.61
1.50E-2
2.00E-02
2.00E+00
0.79
3.00E-2
4.00E-02
4.00E+00
1.1
4.50E-2
6.00E-02
6.00E+00
1.37
6.00E-2
8.00E-02
8.00E+00
1.6
7.50E-2
1.00E-01
1.00E+01
1.83
1.50E-1
2.00E-01
2.00E+01
2.64
2.25E-1
3.00E-01
3.00E+01
3.2
3.00E-1
4.00E-01
4.00E+01
3.71
3.75E-1
5.00E-01
5.00E+01
4
4.50E-1
6.00E-01
6.00E+01
4.45
6.00E-1
8.00E-01
8.00E+01
5
7.50E-1
1.00E+00
1.00E+02
5.44
3
4.00E+00
4.00E+02
7.96
5
6.00E+00
6.00E+02
8.5
8
1.00E+01
1.00E+03
9.01
15
2.00E+01
2.00E+03
9.45
30
4.00E+01
4.00E+03
9.7
45
6.00E+01
6.00E+03
9.78
75
1.00E+02
1.00E+04
9.85
150
2.00E+02
2.00E+04
9.92
300
4.00E+02
4.00E+04
9.95
450
6.00E+02
6.00E+04
9.96
600
8.00E+02
8.00E+04
9.98
750
1.00E+03
1.00E+05
9.99
Analog output calibration = 25 (MKS GP275 Emulation 5.6 VDC FS)
The GP275 emulation with 5.6VDC full scale provides a strongly non linear output with very poor resolution
in the low range and close to atmospheric pressure.
Torr
mbar
Pascal
V
out
1.00E-04
1.33E-04
1.33E-02
0.375
2.00E-04
2.67E-04
2.67E-02
0.377
5.00E-04
6.67E-04
6.67E-02
0.379
1.00E-03
1.33E-03
1.33E-01
0.384
2.00E-03
2.67E-03
2.67E-01
0.392
5.00E-03
6.67E-03
6.67E-01
0.417
1.00E-02
1.33E-02
1.33E+00
0.455
2.00E-02
2.67E-02
2.67E+00
0.523
5.00E-02
6.67E-02
6.67E+00
0.682
1.00E-01
1.33E-01
1.33E+01
0.878
2.00E-01
2.67E-01
2.67E+01
1.155
5.00E-01
6.67E-01
6.67E+01
1.683
1.00E+00
1.33E+00
1.33E+02
2.217
2.00E+00
2.67E+00
2.67E+02
2.842
5.00E+00
6.67E+00
6.67E+02
3.675
1.00E+01
1.33E+01
1.33E+03
4.206
2.00E+01
2.67E+01
2.67E+03
4.577
5.00E+01
6.67E+01
6.67E+03
4.846
1.00E+02
1.33E+02
1.33E+04
4.945
2.00E+02
2.67E+02
2.67E+04
5.019
3.00E+02
4.00E+02
4.00E+04
5.111
4.00E+02
5.33E+02
5.33E+04
5.224
5.00E+02
6.67E+02
6.67E+04
5.329
6.00E+02
8.00E+02
8.00E+04
5.419
7.00E+02
9.33E+02
9.33E+04
5.495
7.60E+02
1.01E+03
1.01E+05
5.534
8.00E+02
1.07E+03
1.07E+05
5.558
9.00E+02
1.20E+03
1.20E+05
5.614