MKS 902B - Page 39

902B Abs Piezo Operation manual
39
Analog output calibration = 23 (MKS GP275 Emulation 9 VDC FS)
The GP275 emulation with 9VDC full scale provides a strongly non linear output with very poor resolution in
the low range and close to atmospheric pressure.
Torr
mbar
Pascal
V
out
1.00E-03
1.34E-03
1.34E-01
0.015
1.32E-03
1.76E-03
1.76E-01
0.020
3.38E-03
4.51E-03
4.51E-01
0.050
4.81E-03
6.41E-03
6.41E-01
0.070
6.28E-03
8.37E-03
8.37E-01
0.090
7.03E-03
9.37E-03
9.37E-01
0.100
1.52E-02
2.02E-02
2.02E+00
0.200
2.45E-02
3.26E-02
3.26E+00
0.300
3.50E-02
4.66E-02
4.66E+00
0.400
4.67E-02
6.23E-02
6.23E+00
0.500
5.98E-02
7.97E-02
7.97E+00
0.600
7.42E-02
9.90E-02
9.90E+00
0.700
9.01E-02
1.20E-01
1.20E+01
0.800
1.07E-01
1.43E-01
1.43E+01
0.900
1.26E-01
1.68E-01
1.68E+01
1.000
1.69E-01
2.25E-01
2.25E+01
1.200
2.18E-01
2.90E-01
2.90E+01
1.400
2.74E-01
3.65E-01
3.65E+01
1.600
3.53E-01
4.71E-01
4.71E+01
1.846
0.4092
5.46E-01
5.46E+01
2.000
0.4879
6.51E-01
6.51E+01
2.200
0.5755
7.67E-01
7.67E+01
2.400
0.6734
8.98E-01
8.98E+01
2.600
0.7836
1.04E+00
1.04E+02
2.800
0.9076
1.21E+00
1.21E+02
3.000
1.02
1.36E+00
1.36E+02
3.164
1.28
1.71E+00
1.71E+02
3.500
1.77
2.37E+00
2.37E+02
4.000
2.24
2.98E+00
2.98E+02
4.390
3.26
4.34E+00
4.34E+02
5.000
4.57
6.09E+00
6.09E+02
5.500
6.65
8.86E+00
8.86E+02
6.000
10.1
1.34E+01
1.34E+03
6.548
12.9
1.71E+01
1.71E+03
6.800
16.1
2.15E+01
2.15E+03
7.000
29.4
3.92E+01
3.92E+03
7.383
56.6
7.55E+01
7.55E+03
7.647
64.1
8.55E+01
8.55E+03
7.700
114.1
1.52E+02
1.52E+04
7.800
200.7
2.68E+02
2.68E+04
7.910
257.0
3.43E+02
3.43E+04
8.000
314.3
4.19E+02
4.19E+04
8.100
368.5
4.91E+02
4.91E+04
8.200
478.0
6.37E+02
6.37E+04
8.400
606.0
8.08E+02
8.08E+04
8.600
773.1
1.03E+03
1.03E+05
8.800