MKS 902B - Page 38

902B Abs Piezo Operation manual
38
Analog output calibration = 20 (OBE Special)
The OBE special emulation provides a linear output from 1 to 1000 Torr.
Torr
mbar
Pascal
V
out
0.1
1.33E-01
1.33E+01
5
1
1.33E+00
1.33E+02
5
2
2.67E+00
2.67E+02
5.005
4
5.33E+00
5.33E+02
5.015
5
6.67E+00
6.67E+02
5.02
10
1.33E+01
1.33E+03
5.045
25
3.33E+01
3.33E+03
5.12
50
6.67E+01
6.67E+03
5.245
75
1.00E+02
1.00E+04
5.37
100
1.33E+02
1.33E+04
5.495
250
3.33E+02
3.33E+04
6.245
500
6.67E+02
6.67E+04
7.495
750
1.00E+03
1.00E+05
8.745
1000
1.33E+03
1.33E+05
9.995
Analog output calibration = 21 (Edwards DV6M)
The Edwards DV6M emulation provides a strongly non linear output with up to 10 Torr.
Torr
mbar
Pascal
V
out
0.0001
1.33E-04
1.33E-02
2
0.0005
6.67E-04
6.67E-02
2.19
0.001
1.33E-03
1.33E-01
2.25
0.002
2.67E-03
2.67E-01
2.38
0.004
5.33E-03
5.33E-01
2.62
0.006
8.00E-03
8.00E-01
2.84
0.008
1.07E-02
1.07E+00
3.06
0.01
1.33E-02
1.33E+00
3.27
0.02
2.67E-02
2.67E+00
4.16
0.04
5.33E-02
5.33E+00
5.56
0.05
6.67E-02
6.67E+00
6.01
0.06
8.00E-02
8.00E+00
6.46
0.08
1.07E-01
1.07E+01
7.04
0.1
1.33E-01
1.33E+01
7.42
0.2
2.67E-01
2.67E+01
8.59
0.4
5.33E-01
5.33E+01
9.4
0.5
6.67E-01
6.67E+01
9.5
0.6
8.00E-01
8.00E+01
9.6
0.8
1.07E+00
1.07E+02
9.71
1
1.33E+00
1.33E+02
9.76
2
2.67E+00
2.67E+02
9.89
4
5.33E+00
5.33E+02
9.96
5
6.67E+00
6.67E+02
9.97
10
1.33E+01
1.33E+03
10
Analog output calibration = 22 (Edwards APG-M)
The Edwards APG-M emulation provides a strongly non linear output.
Torr
mbar
Pascal
V
out
1.00E-4
1.33E-4
1.33E-1
2.0
1.02E-3
1.36E-03
1.36E-01
2.2
7.65E-3
1.02E-02
1.02E+00
3
4.12E-2
5.49E-02
5.49E+00
4
1.32E-1
1.76E-01
1.76E+01
5
5.12E-1
6.83E-01
6.83E+01
6
1.4
1.87E+00
1.87E+02
7
3.29
4.39E+00
4.39E+02
8
9.53
1.27E+01
1.27E+03
9
16.8
2.24E+01
2.24E+03
9.4
26.5
3.53E+01
3.53E+03
9.6
49.9
6.65E+01
6.65E+03
9.8
106
1.41E+02
1.41E+04
9.9
462
6.16E+02
6.16E+04
9.95
760
1.01E+03
1.01E+05
10