MKS 902B - Page 37

902B Abs Piezo Operation manual
37
Analog output calibration = 18 (Pfeiffer IKR251)
The Pfeiffer IKR251 emulation provides a log linear output.
The 902B provides provide only values above 1E-5 Torr.
Torr
mbar
Pascal
V
out
5.00E-9
6.67E-9
6.67E-7
2.3240
1.00E-8
1.33E-8
1.33E-6
2.6250
5.00E-8
6.67E-8
6.67E-6
3.3240
1.00E-7
1.33E-7
1.33E-5
3.6250
5.00E-7
6.67E-7
6.67E-5
4.3240
1.00E-6
1.33E-6
1.33E-4
4.6250
5.00E-6
6.67E-6
6.67E-4
5.3240
1.00E-5
1.33E-5
1.33E-3
5.6250
5.00E-5
6.67E-5
6.67E-3
6.3240
1.00E-4
1.33E-4
1.33E-2
6.6250
5.00E-4
6.67E-4
6.67E-2
7.3240
1.00E-3
1.33E-3
1.33E-1
7.6250
5.00E-3
6.67E-3
6.67E-1
8.3240
9.00E-3
1.20E-2
1.20E+0
8.5000
P = 10
(Vout – c)
V
out
= c + log
10
(P)
c
mbar
10.5
Torr
10.625
Pascal
8.5
Analog output calibration = 19 (Pfeiffer TPR265, Pfeiffer TPR280, Inficon TPR280)
The Pfeiffer TPR265 emulation provides a log linear output.
Torr
mbar
Pascal
V
out
1.00E-4
1.33E-4
1.33E-2
2.199
4.00E-4
5.33E-4
5.33E-2
2.227
5.00E-4
6.67E-4
6.67E-2
2.324
1.00E-3
1.33E3
1.33E-1
2.625
5.00E-3
6.67E-3
6.67E-1
3.324
1.00E-2
1.33E-2
1.33E+0
3.625
5.00E-2
6.67E2
6.67E+0
4.324
1.00E-1
1.33E-1
1.33E+1
4.625
5.00E-1
6.67E-1
6.67E+1
5.324
1.00E+0
1.33E+0
1.33E+2
5.625
5.00E+0
6.67E+0
6.67E+2
6.324
1.00E+1
1.33E+1
1.33E+3
6.625
5.00E+1
6.67E+1
6.67E+3
7.324
1.00E+2
1.33E+2
1.33E+4
7.625
5.00E+2
6.67E+2
6.67E+4
8.324
9.00E+2
1.20E+3
1.20E+5
8.579
1.00E+3
1.33E+3
1.33E+5
8.625
P = 10
(Vout – c)
V
out
= c + log
10
(P)
c
mbar
5.5
Torr
5.625
Pascal
3.5