MKS 902B - Page 36

902B Abs Piezo Operation manual
36
Analog output calibration = 16 (Edwards AIM-S /-SL)
The Edwards AIM-S / SL emulation provides a strongly non linear output.
The 902B provides only values above 1.00E-5 Torr.
Torr
mbar
Pascal
V
out
1.00E-8
1.33E-8
1.33E-6
2.5
1.80E-8
2.40E-8
2.40E-6
2.5
4.40E-8
5.87E-8
5.87E-6
3
6.10E-8
8.13E-8
8.13E-6
3.2
8.30E-8
1.11E-7
1.11E-5
3.4
1.10E-7
1.47E-7
1.47E-5
3.6
2.20E-7
2.93E-7
2.93E-5
4
5.50E-7
7.33E-7
7.33E-5
4.6
7.40E-7
9.87E-7
9.87E-5
4.8
9.80E-7
1.31E-6
1.31E-4
5
1.30E-6
1.73E-6
1.73E-4
5.2
2.10E-6
2.80E-6
2.80E-4
5.6
3.40E-6
4.53E-6
4.53E-4
6
4.20E-6
5.60E-6
5.60E-4
6.2
5.20E-6
6.93E-6
6.93E-4
6.4
7.50E-6
1.00E-5
1.00E-3
6.8
9.00E-6
1.20E-5
1.20E-3
7
1.10E-5
1.47E-5
1.47E-3
7.2
2.20E-5
2.93E-5
2.93E-3
8
3.20E-5
4.27E-5
4.27E-3
8.4
4.30E-5
5.73E-5
5.73E-3
8.6
5.90E-5
7.87E-5
7.87E-3
8.8
9.00E-5
1.20E-4
1.20E-2
9
1.40E-4
1.87E-4
1.87E-2
9.2
2.5E-4
3.33E-4
3.33E-2
9.4
5.0E-4
6.67E-4
6.67E-2
9.6
1.3E-3
1.73E-3
1.73E-1
9.8
2.7E-3
3.60E-3
3.60E-1
9.9
7.5E-3
1.00E-2
1.00E+0
10
Analog output calibration = 17 (Edwards AIM-X /-XL)
The Edwards AIM-X / XL emulation provides a log linear output.
The 902B provides only values above 1.00E-5 Torr.
Torr
mbar
Pascal
V
out
1.00E-8
1.33E-8
1.33E-6
3.286
5.00E-8
6.67E-8
6.67E-6
4.084
1.00E-7
1.33E-7
1.33E-5
4.428
5.00E-7
6.67E-7
6.67E-5
5.227
1.00E-6
1.33E-6
1.33E-4
5.571
5.00E-6
6.67E-6
6.67E-4
6.370
1.00E-5
1.33E-5
1.33E-3
6.714
5.00E-5
6.67E-5
6.67E-3
7.513
1.00E-4
1.33E-4
1.33E-2
7.857
5.00E-4
6.67E-4
6.67E-2
8.656
1.00E-3
1.33E-3
1.33E-1
9.000
5.00E-3
6.67E-3
6.67E-1
9.799