MKS 902B - Page 35

902B Abs Piezo Operation manual
35
Analog output calibration = 15 (Piezo analog output)
Torr
mbar
Pascal
V
out
-8.00E+2
-1.07E+3
-1.07E+5
1.10
-7.00E+2
-9.33E+2
-9.33E+4
1.15
-6.00E+2
-8.00E+2
-8.00E+4
1.22
-5.00E+2
-6.67E+2
-6.67E+4
1.30
-4.00E+2
-5.33E+2
-5.33E+4
1.40
-3.00E+2
-4.00E+2
-4.00E+4
1.52
-2.00E+2
-2.67E+2
-2.67E+4
1.70
-1.00E+2
-1.33E+2
-1.33E+4
2.00
-9.00E+1
-1.20E+2
-1.20E+4
2.05
-8.00E+1
-1.07E+2
-1.07E+4
2.10
-7.00E+1
-9.33E+1
-9.33E+3
2.15
-6.00E+1
-8.00E+1
-8.00E+3
2.22
-5.00E+1
-6.67E+1
-6.67E+3
2.30
-4.00E+1
-5.33E+1
-5.33E+3
2.40
-3.00E+1
-4.00E+1
-4.00E+3
2.52
-2.00E+1
-2.67E+1
-2.67E+3
2.70
-1.00E+1
-1.33E+1
-1.33E+3
3.00
-9.00E+0
-1.20E+1
-1.20E+3
3.05
-8.00E+0
-1.07E+1
-1.07E+3
3.10
-7.00E+0
-9.33E+0
-9.33E+2
3.15
-6.00E+0
-8.00E+0
-8.00E+2
3.22
-5.00E+0
-6.67E+0
-6.67E+2
3.30
-4.00E+0
-5.33E+0
-5.33E+2
3.40
-3.00E+0
-4.00E+0
-4.00E+2
3.52
-2.00E+0
-2.67E+0
-2.67E+2
3.70
-1.00E+0
-1.33E+0
-1.33E+2
4.00
-9.00E-1
-1.20E+0
-1.20E+2
4.05
-8.00E-1
-1.07E+0
-1.07E+2
4.10
-7.00E-1
-9.33E-1
-9.33E+1
4.15
-6.00E-1
-8.00E-1
-8.00E+1
4.22
-5.00E-1
-6.67E-1
-6.67E+1
4.30
-4.00E-1
-5.33E-1
-5.33E+1
4.40
-3.00E-1
-4.00E-1
-4.00E+1
4.52
-2.00E-1
-2.67E-1
-2.67E+1
4.70
-1.00E-1
-1.33E-1
-1.33E+1
5.00
1.00E-1
1.33E-1
1.33E+1
5.00
2.00E-1
2.67E-1
2.67E+1
5.30
3.00E-1
4.00E-1
4.00E+1
5.48
4.00E-1
5.33E-1
5.33E+1
5.60
5.00E-1
6.67E-1
6.67E+1
5.70
6.00E-1
8.00E-1
8.00E+1
5.78
7.00E-1
9.33E-1
9.33E+1
5.85
8.00E-1
1.07E+0
1.07E+2
5.90
9.00E-1
1.20E+0
1.20E+2
5.95
1.00E+0
1.33E+0
1.33E+2
6.00
2.00E+0
2.67E+0
2.67E+2
6.30
3.00E+0
4.00E+0
4.00E+2
6.48
4.00E+0
5.33E+0
5.33E+2
6.60
5.00E+0
6.67E+0
6.67E+2
6.70
6.00E+0
8.00E+0
8.00E+2
6.78
7.00E+0
9.33E+0
9.33E+2
6.85
8.00E+0
1.07E+1
1.07E+3
6.90
9.00E+0
1.20E+1
1.20E+3
6.95
1.00E+1
1.33E+1
1.33E+3
7.00
2.00E+1
2.67E+1
2.67E+3
7.30
3.00E+1
4.00E+1
4.00E+3
7.48
4.00E+1
5.33E+1
5.33E+3
7.60
5.00E+1
6.67E+1
6.67E+3
7.70
6.00E+1
8.00E+1
8.00E+3
7.78
7.00E+1
9.33E+1
9.33E+3
7.85
8.00E+1
1.07E+2
1.07E+4
7.90
9.00E+1
1.20E+2
1.20E+4
7.95
1.00E+2
1.33E+2
1.33E+4
8.00
2.00E+2
2.67E+2
2.67E+4
8.30
3.00E+2
4.00E+2
4.00E+4
8.48
4.00E+2
5.33E+2
5.33E+4
8.60
5.00E+2
6.67E+2
6.67E+4
8.70
6.00E+2
8.00E+2
8.00E+4
8.78
7.00E+2
9.33E+2
9.33E+4
8.85
8.00E+2
1.07E+3
1.07E+5
8.90
9.00E+2
1.20E+3
1.20E+5
8.95
1.00E+3
1.33E+3
1.33E+5
9.00
For positive pressure (V
out
>5 V)
Piezo pressure = 10
(PZVout-6)
For negative pressure (V
out
<=5V):
-1
Piezo pressure = ——————
10
(PZVout-4)