EasyManua.ls Logo

MKS GM50A User Manual

MKS GM50A
113 pages
To Next Page IconTo Next Page
To Next Page IconTo Next Page
Page #1 background imageLoading...
Page #1 background image
1046210-001, Rev A
January, 2013
MKS G-Series
Digital
Mass Flow Controllers
Instruction Manual

Table of Contents

Question and Answer IconNeed help?

Do you have a question about the MKS GM50A and is the answer not in the manual?

MKS GM50A Specifications

General IconGeneral
BrandMKS
ModelGM50A
CategoryController
LanguageEnglish

Summary

Warranty

Mass Flow Device Safety Information

Safety Procedures and Precautions

General safety precautions to observe during all phases of instrument operation.

Chapter Three: Installation and Configuration

Product Location and Requirements

Details ventilation, temperature, power, and mounting requirements for the MFC.

Installation Procedure

Step-by-step guide for installing the MFC into a system.

Chapter Four: Analog and Digital Interfaces

Analog Interface Input and Output Options

Details pinouts for 9-pin and 15-pin D connectors for analog I/O.

Digital Interface Input and Output Options

Overview of digital I/O options (DeviceNet, Profibus, RS485).

DeviceNet Digital Interface Using 5 Pin Microconnector

Details the 5-pin DeviceNet connector for communication, power, and shielding.

DeviceNet Baud Rate and MAC ID Switches

How to set baud rate and MAC ID using rotary switches or software.

Profibus Digital Interface Using Two 9 Pin D Connectors

Details Profibus interface using 9-pin D connectors for power and communication.

RS485 Digital Interface Using 9 Pin D Male Connector

Details the 9-pin D connector for RS485 communication and power.

Setting the RS485 Device MACID and Baud Rate

How to set RS485 MACID and baud rate via host computer or Ethernet.

Warm-Up and Zero the MFC

Procedure for warming up and zeroing the MFC.

Chapter Five: Ethernet Interface Setup and Configuration

Step 1: Install the Java™ Plug-in

Instructions for installing the Java plug-in required for the Ethernet interface.

Step 2: Setup Network for Communication through Ethernet

Three options for setting up network communication via Ethernet.

Option 1: Network Automatic Setup

Using a software script to create a network connection to the MFC.

Option 2: Manual Setup

Manual steps to configure network settings for Ethernet interface access.

Chapter Six: Embedded Web-Based GUI and Diagnostics

Setup Mode

Enables configuration of MFC settings such as zeroing, IP address, and operating pressure.

Chapter Seven: Maintenance

Flow Zero Adjustment

Procedures for checking and resetting the MFC's zero output for accuracy.

Chapter Eight: Troubleshooting

Troubleshooting Chart

A chart listing symptoms, possible causes, and corrective actions for MFC issues.

Appendix A: Product Specifications

Related product manuals