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MKS 651D Series User Manual

MKS 651D Series
162 pages
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118965-P1
Preliminary, 5/02
MKS Type 651D
Pressure Controller

Table of Contents

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MKS 651D Series Specifications

General IconGeneral
BrandMKS
Model651D Series
CategoryController
LanguageEnglish

Summary

Safety Information

Instructional Symbols and Warnings

Defines WARNING, CAUTION, and NOTE messages used in the manual.

Unit Symbols and Safety Precautions

Describes symbols on the unit and essential safety procedures for operation and maintenance.

Chapter One: General Information

Introduction to the 651D Controller

Introduces the MKS Type 651D Pressure Controller and its primary capabilities.

Manual Structure and Organization

Explains the layout and content of the manual's chapters and appendices.

Customer Support Information

Provides details on calibration, repair services, and MKS service centers.

Chapter Two: Installation

Unit Unpacking and Initial Setup

Guides on unpacking, inspecting, and preparing the unit for installation.

Installation Environment and Compatibility

Covers installation requirements, environmental conditions, and product compatibility.

Connection Interfaces and Cables

Details requirements for interface, adapter, and shielded cables.

Unit Setup and Configuration

Covers mounting, power, fuses, grounding, line voltage, and rear panel connectors.

Chapter Three: Overview

Control Modes and Parameters

Explains PID control, gain, phase, set points, softstart, and process limits.

Front and Rear Panel Components

Identifies and describes front/rear panel controls, connectors, and switches.

Optional Features and Unit Labels

Covers battery backup, its voltage/life, storage, and unit labels.

Chapter Four: Local Operation

Controller Startup and Initial Setup

Details startup display, battery status checks, and initial setup procedures.

Parameter Configuration and Adjustment

Guides on valve setup, operating parameters, set points, gain, phase, and limits.

Specific Operation Modes

Covers backfill control, position set points, and process limits.

Chapter Five: Remote RS-232 Operation

RS-232 Communication Fundamentals

Explains RS-232 protocol, message syntax, and command execution priority.

RS-232 Configuration and Control Messages

Details setup, control messages for valve, set points, gain, phase, and sensor configuration.

RS-232 Informational and Status Messages

Covers reporting pressure, valve position, system status, firmware, and checksum via RS-232.

Chapter Six: Remote Digital Logic Control

Digital Input and Output Functions

Explains digital input/output functions, priorities, and circuitry.

Activate Softstart Rate Control

Details how to activate softstart control using TTL signals via the interface connector.

Chapter Seven: Maintenance and Troubleshooting

Routine Maintenance Procedures

Covers fuse, RAM, CPU board, and battery replacement.

Troubleshooting Common Issues

Addresses out-of-range pressure, checksum errors, and A/D converter span calibration.

Appendix A: Product Specifications

Technical Specifications Overview

Lists operating temp, signals, compliance, connectors, dimensions, power, fuses, and humidity.

Appendix B: Model Code Explanation

Understanding the Model Code

Explains the structure and ordering codes for the 651D controller model.

Appendix C: Initial Settings

Default Configuration Parameters

Lists initial settings for parameters like baud rate, units, ranges, and control modes.

Appendix E: RS-232 Message Summary

RS-232 Command Summary

Provides a summary of RS-232 commands for setup, control, and informational messages.

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