MKS 651D Series User Manual

Chapter Five: Remote RS-232 Operation Setup Messages
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Table 14: RS-232 Setup Messages (Continued)
Valve Position Signal
Output Range
B value
value: 0 = 5 V
1 = 10 V*
R 31
B value
value: 0 = 5 V
1 = 10 V
Valve Battery
Back-Up Control
K value
value:
0 = Disable option*
1 = Open valve at
power failure
2 = Close valve at
power failure
R 40
K value
value:
0 = Option disabled
1 = Valve opens at
power failure
2 = Valve closes at
power failure
Sensor Type U value
value: 0 = Absolute*
R 36
U value
value:
0 = Absolute
Sensor Signal Input
Range
G value
value: 0 = 1 V
1 = 5 V
2 = 10 V*
R 35
G value
value: 0 = 1 V
1 = 5 V
2 = 10 V
Sensor Range LOW EL value
value: 00 = 0.1 Torr
01 = 0.2
02 = 0.5
03 = 1
04 = 2
05 = 5
06 = 10*
21 = 20
07 = 50
08 = 100
22 = 200
09 = 500
10 = 1000
11 = 5000
12 = 10000
13 = 1.33 mBar
14 = 2.66
15 = 13.33
16 = 133.3
17 = 1333
18 = 6666
19 = 13332
R 55
EL value
value: 00 = 0.1 Torr
01 = 0.2
02 = 0.5
03 = 1
04 = 2
05 = 5
06 = 10
21 = 20
07 = 50
08 = 100
22 = 200
09 = 500
10 = 1000
11 = 5000
12 = 10000
13 = 1.33 mBar
14 = 2.66
15 = 13.33
16 = 133.3
17 = 1333
18 = 6666
19 = 13332

MKS 651D Series Specifications

General

Brand	MKS
Model	651D Series
Category	Controller
Language	English