Name: MKS 946 Series
Brand: MKS
Rating: 5 (1 reviews)

To Next Page

Series 946 Vacuum System Controller

Operation and Maintenance Manual

Instruction Manual p/n: 100018121

Rev A, June 2020

Table of Contents2
Safety Information6
Symbols Used in this Manual and Their Definitions6
Safety Precautions6
Safety Procedures and Precautions6
Specifications8
Controller8
Pressure, Flow Sensors, & Valves10
Controller Display14
Display Message14
Display Resolutions15
Serial Communication Response Format16
Feature, Control Locations and Dimensions17
Typical Applications for the Series 946 Controller19
MKS Series 946 Vacuum System Controller20
Operating the Series 946 Controller22
Power22
Front Panel Control Lock22
Front Panel Display22
Standard Front Panel Display22
Large Font Display24
System Setup24
Overview of 946 System Setup24
Display System Setup Parameters25
Change and Save a Parameter Value26
Description of the System Setup Parameters26
Channel Setup for Pressure Measurement30
Overview of 946 Channel Setup30
Setup for a Capacitance Manometer32
Setup for a CP (Convection Pirani), Convectron, or PR Sensor35
Setup a Cold Cathode Sensor38
Setup a Hot Cathode Sensor41
Power Control of a Pressure Sensor45
Power (Including Degas) Control of a Sensor Using Front Panel Control Button45
Power (Including Degas) Control of a Sensor Via 37 Pin AIO D-Sub Connector46
Power (Including Degas) Control of a Sensor Using Serial Communication Commands46
Channel Setup for Flow Measurement and MFC Based Pressure Control47
Simple Operation of a Mass Flow Controller47
Setup MFC Controlling Parameters for Flow Control48
Set MFC(S) for Dynamically Controlling System Pressure50
Pressure Control Using a Control Valve60
Valve Type Selection61
Valve Control Recipe Setup62
Activate a Pressure Control with a Valve63
Terminate a PID Pressure Control Using a Valve64
Installing Vacuum Sensors66
Installing Cold Cathode Sensors66
Locating a Cold Cathode Sensor66
Orienting a Cold Cathode Sensor66
Managing Contamination in a Cold Cathode Sensor66
Connecting the Series 431/422 Sensor66
Connecting the 423 I-Mag Sensor67
Installing Hot Cathode Sensors67
Over Pressure Conditions67
Locating a Hot Cathode Sensor67
Preventing Contamination in a Hot Cathode Sensor67
Orienting a Hot Cathode Sensor68
Connecting a Hot Cathode Sensor to the Vacuum System68
Connecting a Hot Cathode Sensor to the 946 Controller68
Installing Convection Pirani, Convectron, or Pirani Sensors69
Over Pressure Conditions69
Locating the Sensor70
Preventing Contamination in a Pirani Sensor70
Orienting the Series 317Convection Pirani or Convectron Sensor70
Orienting the Series 345 Pirani Sensor70
Connecting Convection Pirani, Convectron, or Pirani Sensors70
Preparing the 317 Sensor for Bakeout71
Installing Capacitance Manometers - MKS Baratron72
Installing a Capacitance Manometer72
Connecting a Capacitance Manometer72
Series 902B Piezo73
Installing Mass Flow Controllers73
Environmental Requirements73
Interface Cables73
Setup74
Gas Line Connections74
Installing a Pressure Control Valve74
Installing an Upstream Solenoid Valve74
Installing a Downstream MKS 153 or T3B Throttle Valve75
Connecting Relay and Analog Outputs77
Connecting 946 Relay Outputs77
Pin out for the 946 Relay Output77
Proper Setting of a Relay78
Relay Inductive Loads and Arc Suppression79
Connecting the 946 Analog Output79
Buffered Analog Output80
Logarithmic/Linear and Combination Analog Output91
Logarithmic/Linear Analog Output91
Combination Analog Output91
Logarithmic/Linear Analog Output When the Sensor Power Is Turned off93
RS232/485 Serial Communication Commands94
Serial Communication Wiring Diagram94
Communication Protocols94
Pressure Reading Commands95
Relay and Control Setting Commands96
Capacitance Manometer Control Commands97
Convection Pirani, Convectron and Pirani Control Commands97
Cold Cathode Control Commands98
Hot Cathode Control Commands99
MFC Control Commands100
Pressure (Valve) Control Commands100
PID Recipe Setting Commands101
Ratio Recipe Setting Commands102
Pid/Ratio Control Activation Command102
System Commands103
Error Codes105
Maintenance of Series 946 Controller Modules106
Removing and Installing a Sensor Module106
Removing and Installing AIO Module107
Pressure Control (PC) Module108
Mounting the 946 Controller109
AC Power Cord110
Maintenance and Service of MKS Vacuum Sensors111
And 431 Cold Cathode Sensor111
Cold Cathode Theory111
Maintenance of Series 431/422 Cold Cathode Sensor112
Maintenance of Series 423 I-Mag Cold Cathode Sensor115
Disassemble the I-Mag Sensor115
Clean the I-Mag Sensor117
Assemble the I-Mag Sensor117
Preparing the Sensor for Bakeout118
Maintenance of Low Power Nude and Mini BA Hot Cathode Sensors118
Hot Cathode Theory118
Cleaning the Hot Cathode Sensor119
Testing the Hot Cathode Sensor119
Maintenance of a Pirani Sensor120
Theory of a Pirani Pressure Sensor120
Cleaning the Series 345 Sensor121
Cleaning the Series 317 Sensor122
Maintenance of a Capacitance Manometer123
Theory of a Capacitance Manometer123
Repairing the Baratron Capacitance Manometer124
Spare Parts and Accessories125
Appendix127
MFC Gas Conversion Factors for Selected Gases127

MKS 946 Series User Manual

Table of Contents

Questions and Answers:

MKS 946 Series Specifications

Related product manuals

Brand	MKS
Model	946 Series
Category	Controller
Language	English