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General| Brand | MKS |
|---|---|
| Model | 946 Series |
| Category | Controller |
| Language | English |
Defines symbols used in the manual for safety and operational guidance.
Outlines general safety precautions for all phases of instrument operation.
Details the electrical and physical specifications for the controller unit.
Lists specifications for various pressure and flow sensors and compatible valves.
Describes the display characteristics and capabilities of the controller's interface.
Details how to power the controller on and off.
Describes how to lock and unlock the front panel controls for security.
Explains the front panel display interface and its functions.
Details how to configure system parameters like units, communication, and recipes.
Guides through setting up parameters for individual pressure sensors.
Describes how to control sensor power and degas functions.
Covers setting up flow measurement and MFC-based pressure control.
Details how to control system pressure using upstream or downstream valves.
Guides the installation of Cold Cathode sensors, including connections.
Details the installation of Hot Cathode sensors and related precautions.
Guides the installation of Pirani, Convectron, and Convection Pirani sensors.
Guides the installation of MKS Baratron Capacitance Manometers.
Covers installation of Series 902B Piezo resistive gauges.
Guides the installation of Mass Flow Controllers (MFCs).
Guides the installation of pressure control valves for system pressure control.
Details how to connect the 946's relay outputs for system control.
Guides connecting the 946's analog output signals for data acquisition.
Explains the buffered analog output signals from sensors.
Details logarithmic, linear, and combination analog outputs.
Illustrates the wiring diagram for serial communication.
Details communication protocols, baud rates, and character formats.
Lists commands for reading pressure values from sensors.
Covers commands for setting relay and control parameters.
Lists serial commands for controlling Capacitance Manometers.
Lists serial commands for Pirani, Convectron, and Convection Pirani sensors.
Lists serial commands for controlling Cold Cathode sensors.
Lists serial commands for controlling Hot Cathode sensors.
Lists serial commands for controlling Mass Flow Controllers (MFCs).
Lists serial commands for controlling pressure via valves.
Lists serial commands for setting PID control recipes.
Lists serial commands for setting ratio control recipes.
Lists commands for activating PID and Ratio control.
Lists serial commands for system-level configuration and status.
Lists and explains error codes returned by serial commands.
Guides on removing and installing sensor modules.
Details removing and installing the AIO module.
Covers removing and installing the Pressure Control (PC) module.
Explains how to mount the controller in racks or on a benchtop.
Provides information on the AC power cord and its proper use.
Details maintenance for 422 and 431 Cold Cathode sensors.
Details maintenance for the 423 I-Mag Cold Cathode sensor.
Details maintenance for Hot Cathode sensors.
Details maintenance procedures for Pirani sensors.
Details maintenance procedures for Capacitance Manometers.
Provides conversion factors for various gases used with MFCs.
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