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MKS Mass-Flo 1479A - User Manual

MKS Mass-Flo 1479A
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119474-P1
Rev B, 10/97
Instruction Manual
MKS Type 1479A
Mass-Flo
®
Controller
Six Shattuck Road
Andover, MA 01810-2449
(800) 227-8766 or (978) 975-2350
Fax: (978) 975-0093
E-mail: mks@mksinst.com
Web site: http://www.mksinst.com

Table of Contents

Questions and Answers

  • K
    Kevin SantiagoAug 2, 2025
    Why is my MKS Mass-Flo 1479A oscillating?
    • A
      Austin RomeroAug 2, 2025
      If your MKS Controller exhibits oscillation, it could be due to several reasons. The controller gain setting might be too high, so try reducing it by turning it counter-clockwise. Also, verify the upstream pressure regulator is correct per the manufacturer's specifications and reduce upstream pressure if it's too high. Lastly, excessive valve preload could be the culprit; in that case, readjust the valve.
  • R
    Ronald MillerAug 7, 2025
    What to do if my MKS Mass-Flo 1479A indicates a negative flow?
    • K
      Kimberly LewisAug 8, 2025
      If your MKS Controller unit indicates a negative flow, it is likely installed backward in the gas stream. Reinstall the unit in the proper flow direction to resolve this issue.
  • A
    April MayerAug 12, 2025
    Why does my MKS Controller not achieve full flow?
    • L
      luis15Aug 12, 2025
      If the MKS Controller does not achieve full flow, several factors could be responsible. First, the upstream pressure might be too low; try increasing it. Second, excessive valve preload could be the issue, so readjust the valve. Finally, the maximum valve current setting could be incorrect.
  • Z
    zsmithAug 17, 2025
    What to do if MKS Controller shows no output or overrange at zero?
    • L
      Lisa HortonAug 17, 2025
      If you observe no output or overrange at zero on your MKS Controller after warm-up, it may be due to an improper cable, the valve override function being applied, or malfunctioning electronics. Check the cable type and disconnect the valve override. If the issue persists, return the unit for service.
  • M
    mariafrenchAug 22, 2025
    Why my MKS Mass-Flo 1479A Controller does not function?
    • C
      Catherine DavisAug 22, 2025
      If the MKS Controller does not function, it is likely due to malfunctioning electronics. Return it for service.
  • E
    Eric PattersonAug 27, 2025
    How to fix excessive closed conductance on MKS Mass-Flo 1479A Controller?
    • M
      Michael EverettAug 27, 2025
      If you're experiencing excessive closed conductance with your MKS Controller, it's likely due to inadequate valve preload. Readjust the valve.

Summary

Installation

Unpacking and Setup Procedures

Covers unpacking, environmental needs, and setup for installation.

Overview

Electrical Connections and Connector Pinouts

Explains electrical connections and provides pinouts for various connectors.

Operation

Start Up, Zeroing, and Gain Adjustment

Guides on starting up, zeroing, and adjusting controller gain for optimal performance.

Troubleshooting

Troubleshooting Guide and Valve Preload Adjustment

Provides a troubleshooting chart for common issues and steps to adjust valve preload.

Product Specifications

Model Code

MFC Sizing Guidelines

Determining Valve Configuration and Selection

Guides on determining valve configuration using Cv and selecting the appropriate unit.

MKS Mass-Flo 1479A Specifications

General IconGeneral
TypeMass Flow Controller
ChannelsSingle
DisplayLCD
Operating Temperature0 to 50 °C
Output Signal0-5 VDC or 4-20 mA
Communication InterfaceRS-232
Materials of ConstructionStainless steel

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