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MKS 937B Series User Manual

MKS 937B Series
120 pages
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Table of Contents

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MKS 937B Series Specifications

General IconGeneral
CommunicationRS-232, RS-485
DisplayLCD
Operating Temperature0 to 50°C
Storage Temperature-20 to 70°C
TypePressure Controller
Pressure RangeSensor Dependent
Response TimeSensor Dependent

Summary

Package Contents

Safety Information

Symbols Used in this Manual

Explains the meaning of various symbols used in the manual.

Safety Precautions

Lists general safety precautions and procedures for safe operation.

General Safety Warnings

Critical warnings regarding electrical safety, environment, and service personnel.

Specifications

Controller Specifications

Details controller specifications including power, display, modules, and certifications.

Sensor Specifications

Lists sensor types, pressure ranges, response times, resolution, repeatability, and materials.

Controller Display Messages

Lists and explains various messages displayed on the controller's LCD screen.

Features and Controls

Panel Layouts

Overview of the front and rear panel controls, connectors, and dimensions.

Typical Applications

937B Multi-Sensor High Vacuum System

Controller Operation Overview

Explains controller operation, analog outputs, relay control, and computer communication.

Operating the 937B Controller

Power

Instructions for powering the controller on and off.

Front Panel Control Lock

How to lock and unlock the front panel controls.

Front Panel Display

Details the front panel display features, standard and large font modes.

System Setup

Overview and detailed description of system setup parameters and their configuration.

Channel Setup for Pressure Measurement

How to set up individual sensor channels, including parameters for various sensor types.

Power Control of a Pressure Sensor

Procedures for controlling sensor power via front panel, connector, or serial commands.

Leak Test Using the 937B Controller

Principles and procedures for performing leak tests using the controller's capabilities.

Installing Vacuum Sensors

Installing cold cathode sensors

Guidance on locating, orienting, connecting, and managing cold cathode sensors.

Installing hot cathode sensors

Instructions for locating, connecting, and preventing contamination of hot cathode sensors.

Installing Pirani Sensors

Procedures for locating, orienting, connecting, and preparing Pirani sensors for bakeout.

Capacitance Manometers - MKS Baratron

Introduction and instructions for installing and connecting MKS Baratron capacitance manometers.

Connecting Relay and Analog Outputs

Connecting 937B relay outputs

Details on relay outputs, pinouts, and proper parameter settings for relay control.

Connecting the 937B Analog Output

Information on analog outputs including buffered, logarithmic, and combination types.

Buffered analog output

Describes buffered analog output signals, their characteristics, and behavior when power is off.

Logarithmic/Linear and combination analog output

Explains linearized analog outputs and configuring combination analog outputs from multiple sensors.

937B RS232/485 Serial Communication Commands

Communication protocols

Details serial communication wiring, protocols, and character formats.

Pressure reading commands

Lists serial commands for reading pressure from single and combination channels.

Relay and control setting commands

Serial commands for setting relay parameters and control functions for various sensors.

Capacitance manometer control commands

Serial commands for controlling capacitance manometers, including type, range, and zeroing.

Pirani and convection Pirani control commands

Serial commands for Pirani and CP sensors, covering calibration, zeroing, gas type, and power.

Cold cathode control commands

Serial commands for controlling cold cathode sensors, including setpoints, channels, and power.

Hot cathode control commands

Serial commands for controlling hot cathode sensors, including setpoints, emission, and degas.

System commands

Serial commands for system-wide settings like address, baud rate, display mode, and firmware.

Error code

Lists and explains error codes encountered during serial communication.

937B ProfiBus communication protocol and commands

Covers ProfiBus electrical connections, GSD protocol, command lists, and buffer maps.

937A Emulated Operation and RS232/485 Serial Communication Commands

Operating the 937B controller in 937A emulated operation mode

Guides on operating the 937B in 937A emulation mode using existing cables and connectors.

Communication protocols

Compares serial communication protocols between 937B and 937A for emulation.

Pressure reading commands

Lists serial commands for reading pressure in 937A emulation mode.

Relay and control setting commands

Serial commands for relay and control settings compatible with 937A emulation.

Cold cathode control commands

Serial commands for cold cathode control specific to 937A emulation.

User calibration commands

Serial commands for user calibration within the 937A emulation mode.

System commands

System commands for panel lock, communication, and firmware version in 937A emulation.

ASCII character table

A reference table of ASCII characters used in communication.

Maintenance of Series 937B Controller modules

Removing and Installing a Sensor Module

Step-by-step instructions for removing and installing sensor modules into the controller.

Removing and Installing AIO Module

Procedure for removing and installing the Analog Input/Output (AIO) module.

Communication Module

Information about the communication module and available serial ports.

Power Supply

Safety warnings and notes regarding the controller's internal power supply unit.

Mounting the 937B controller

Instructions for mounting the controller in racks or on a benchtop for proper installation.

AC Power Cord

Guidelines for connecting, grounding, and using the AC power cord safely.

Maintenance and Service of HPS® Vacuum Sensors

421 Cold cathode sensor

Theory of operation, advantages, and maintenance procedures for 421 Cold Cathode sensors.

Maintenance of Series 423 I-MAG® Cold Cathode Sensor

Procedures for connecting, disassembling, cleaning, assembling, and preparing the 423 I-MAG sensor.

Maintenance of Low Power Nude and Mini BA hot cathode sensors

Theory, cleaning, and testing procedures for Low Power Nude and Mini BA hot cathode sensors.

Maintenance of Pirani Sensors

Theory, cleaning, testing, and bakeout preparation for Pirani sensors (Series 345 and 317).

Maintenance of Capacitance Manometer

Theory of operation and repair guidance for capacitance manometers.

Spare Parts and Accessories

APPENDIX

Hot cathode gauge gas correction factors

A table of relative ionization gas correction factors for various substances used with hot cathode gauges.

Product Warranty

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