MKS 937B Series User Manual

MKS 937B Operation Manual
19
4 Typical Applications for the Series 937B
Controller
x The measurement of pressure in high vacuum chambers.
x Pressure control in high vacuum systems and process sequencing using relay set points.
x Sensing abnormal pressure events and initiating and controlling appropriate security
measures using the relay set points.
x Controlling system pressure by using the analog output as the input to an automatic pressure
controller.
x Starting or stopping system processes using relay set points.
x Measuring backfill pressures.
x Leak testing vacuum systems.
x Controlling acceleration and light source vacuum systems.

MKS 937B Series Specifications

General

Brand	MKS
Model	937B Series
Category	Controller
Language	English