MKS 937B Series User Manual

MKS 937B Operation Manual
91
10.3 Pressure reading commands
Command Function Response Meaning
Read Single Channel pressure
Pn
(n=1 to 5)
Read pressure
on Channel n
d.dEree
dEree
(d,e=0 to 9)
Pressure in selected units (dEree, with 2
leading spaces, in single digit resolution regions
only)
HI>Eree
Above range of 10
r
ee
AA_ Eree
At atmosphere (Pirani only, >400 torr, or
equivalent)
LO<Eree
Below range of 10
r
ee
LO
CC below range, not stared, or in roll-back
HV_OFF!
Cold cathode HV power off
WAIT
CC startup delay
CONTROL!
CC in controlled state
NEGATIV!
CM reading below zero pressure
NOGAUGE!
No sensor on channel
MISCONN!
Sensor improperly connected, or broken
filament (PR, CP only)
PZ
Read pressure
on all channel
5 of above,
separated by
spaces,
ending with
<cr>
Same as above, First 4 responses are padded
with spaces to make a total of 9 characters
each. Channel n response starts with character
number 9n-8
Read combination pressure
Cn
(n=1, 2)
Read pressure
on channel n and
its combination
sensor
d.dEree
dEree
(d,e=0 to 9)
Pressure in selected units
HI
Above combined range
LO
Below combined range
NOGAUGE!
Sensor missing/misconnected
Disabled!
No ion gauge is assigned to the channel.
Table 10-6 937A pressure reading serial commands.

MKS 937B Series Specifications

General

Brand	MKS
Model	937B Series
Category	Controller
Language	English