MKS 937B Series User Manual

MKS 937B Operation Manual
77
9.6 Cold cathode control commands
Command Parameter Response Function
PROn
(n=1, 3, 5)
d.dd Eree
(d,e=0 to 9)
d.dd Eree
(d,e=0 to 9)
Query or set protection setpoint value for ion gauge for
channel n. The valid PRO range is 1x10
-5
to 1x10
-2
torr.
Default value is 5x10
-3
torr.
CSPn
(n=1, 3, 5)
d.dd Eree
(d,e=0 to 9)
d.dd Eree
(d,e=0 to 9)
Query and set control setpoint value for an ion gauge on
channel n. Valid CSP range is 5x10
-4
to 1x10
-2
torr for
Pirani, and is 2x10
-3
to 1x10
-2
torr for convention Pirani.
XSPn
(n=1, 3, 5)
ON or OFF ON or OFF Extend the upper control setpoint range from 1x10
-
2
torr
to 9.5x10
-1
torr.
CHPn
(n=1, 3, 5)
d.dd Eree
(d,e=0 to 9)
d.dd Eree
(d,e=0 to 9)
Query and set control setpoint hysteresis value for an
ion gauge on channel n. Valid CHP range is 5.5x10
-4
to
1.1x10
-2
torr for Pirani, and is 2.2x10
-3
to 1.1x10
-2
torr
for convention Pirani. Default value is 1.5X the control
setpoint value.
CSEn
(n=1, 3, 5)
A1, B1,
A2, B2,
C1, C2,
OFF
A1, B1,
A2, B2,
C1, C2,
OFF
Query, enable/disable the control channel status for an
ion gauge on channel n.
CTLn
(n=1, 3, 5)
AUTO,
SAFE,
OFF
AUTO,
SAFE,
OFF
AUTO: ion gauge can be turned on & off by the
controlling gauge. SAFE, ion gauge can be turned off,
but, not be turned on by the controlling gauge.
UCn
(n=1,3, 5)
dd.d
(d=0 to 9)
dd.d
(d=0 to 9)
Query or set a gas correction factor for a CC gauge on
Channel n. Valid range is from 0.1 to 10.
CPn
(n=1,3, 5)
ON or OFF ON or OFF Query the channel power status for PR, CP, HC or high
voltage status for CC.
Turn on/off the channel power for PR, CP, HC, or high
voltage for CC).
GTn
(n=1,3, 5)
Nitrogen
Argon
Helium
Nitrogen
Argon
Helium
Query or set a gas type for HC/CC on channel n.
Tn
(n=1,3, 5)
W, O, G, P,
C, R
Ion gauge status query.
W = WAIT
O = OFF
G = GOOD
P = PROTECT
C = Control
R = Rear panel Ctrl off
TDCn
(n=1,3, 5)
d
(d=0 to 9)
d
(d=0 to 9)
Time delay for staring CCG, 3 to 300 secs
FRCn
(n=1,3,5)
d.dd Eree
(d,e=0 to 9)
d.dd Eree
(d,e=0 to 9)
Query or set the pressure to trigger fast relay control
output. Only available for special CC board with fast
relay, and the setpoint value needs to between 5x10
-3
to
2x10
-10
torr.
Table 9-7 937B cold and hot cathode control commands.

MKS 937B Series Specifications

General

Brand	MKS
Model	937B Series
Category	Controller
Language	English