MKS 937B Series User Manual

MKS 937B Operation Manual
10
2 Specifications
1
2.1 Controller
Pressure measuring range
2
1 x 10
-11
to 2.0 x 10
+5
Torr
1 x 10
-11
to 2.6 x 10
+5
mbar
1 x 10
-9
to 2.6 x 10
+7
Pa
Relay set point range
3
CC (Cold Cathode) 2.0 x 10
-10
to 5.0 x 10
-3
Torr
2.7 x 10
-10
to 6.5 x 10
-3
mbar
2.7 x 10
-8
to 6.5 x 10
-1
Pa
HC (Hot Cathode) 5.0 x 10
-10
to 5.0 x 10
-3
Torr
6.5 x 10
-10
to 6.5 x 10
-3
mbar
6.5 x 10
-8
to 6.5 x 10
-1
Pa
Pirani 2.0 x 10
-3
to 9.5 x 10
+1
Torr
2.7 x 10
-3
to 1.2 x 10
+2
mbar
2.7 x 10
-1
to 1.2 x 10
+4
Pa
CP (Convection Pirani) 2.0 x 10
-3
to 9.5 x 10
+2
Torr
2.7 x 10
-3
to 1.2 x 10
+3
mbar
2.7 x 10
-1
to 1.2 x 10
+5
Pa
CM (Capacitance Manometer) 1% to 95% of the measurement range of the head (e.g. 1 Torr
head is1.0 x 10
-2
to 9.5 x 10
-1
Torr)
Allowed range within which a control gauge may switch on a cold or hot cathode
Pirani 5.0 x 10
-4
to 9.5 x 10
-1
Torr
6.5 x 10
-4
to 1.3 x 10
-1
mbar
6.5 x 10
-2
to 1.3 x 10
1
Pa
CP (Convection Pirani) 2.0 x 10
-3
to 9.5 x 10
-1
Torr
2.7 x 10
-3
to 1.3 x 10
-1
mbar
2.7 x 10
-1
to 1.3 x 10
1
Pa
Protection setpoint
4
CC & HC 1.0x10
-5
to 1.0x10
-2
torr, default setting: 5.0x10
-3
Torr
Operating temperature range 5° to 40°C (41° to 104°F)
Storage temperature range -10° to 55°C (14° to 131°F)
Relative humidity 80% maximum for temperatures less than 31°C, decreasing
linearly to 50% maximum at 40°C
Altitude 2000 m (6561 ft) maximum
Insulation coordination Installation (Over-voltage) Category II, Pollution Degree 2
1
Design and/or specifications are subject to change without notice.
2
The measurement range depends upon the sensor options selected.
3
Relay setpoint values are automatically adjusted when pressure unit is changed.
4
The protection setpoint is always enabled in 937B.

MKS 937B Series Specifications

General

Brand	MKS
Model	937B Series
Category	Controller
Language	English