MKS 937B Series User Manual

MKS 937B Operation Manual
76
9.4 Capacitance manometer control commands
Command Parameter Response Function
BTn
(n=1 to 6)
ABS or
DIFF
ABS or
DIFF
Query or set the type of capacitance manometer.
Default = ABS.
RNGn
(n=1 to 6)
0.01 to
20000
0.01 to
20000
Query or set the full scale pressure measurement range
for a capacitance manometer. Valid range is from 0.01
to 20000, and default range is 1000 torr.
BVRn
(n=1 to 6)
5 ,10, 1U,
5U, 10U,
1B, 2B
5 ,10, 1U,
5U, 10U,
1B, 2B
Query or set the full scale voltage output range for a
capacitance manometer. Here, U means unidirectioanl,
and B meads bidirectional. Default = 10V.
VACn
(n=1 to 6)
OK or NAK Zero an absolute capacitance manometer on channel n.
Execute only when the signal is less than 5% of the full
scale.
ATZn
(n=1 to 6)
OK or NAK Zero a differential capacitance manometer on channel n.
AZn
(n=1 to 6)
A1, B1,
A2, B2,
C1, C2, NA
A1, B1,
A2, B2,
C1, C2, NA
Query or set capacitance manometer autozero control
channel n, or disable autozero (NA). Execute only when
the signal is less than 5% of the full scale.
Table 9-5 937B capacitance manometer serial commands.
9.5 Pirani and convection Pirani control commands
Command Parameter Response Function
ATMn
(n=1 to 6)
d.ddE+ee
(ambient
pressure)
d.ddE+ee
Send an atmospheric pressure to perform ATM
calibration. The PR/CP must be at atmospheric pressure
when running ATM calibration.
VACn
(n=1 to 6)
OK or NAK Zero a PR/CP on channel n. Execute only when the
pressure reading is less than 1X10
-2
torr.
AZn
(n=1 to 6)
A1, B1,
A2, B2,
C1, C2, NA
A1, B1,
A2, B2,
C1, C2, NA
Query or set an autozero (CC or HC) control channel n
for a PR/CP, or disable autozero (NA). Execute only
when the pressure reading is less than 1X10
-2
torr.
GTn
(n=1 to 6)
Nitrogen
Argon
Helium
Nitrogen
Argon
Helium
Query or set a gas type for PR/CP on channel n.
CPn
(n=1 to 6)
ON or OFF ON or OFF Query the channel power status for PR, CP, HC or high
voltage status for CC.
Turn on/off the channel power for PR, CP, HC, or high
voltage for CC).
Table 9-6 937B Pirani and Convection Pirani control commands.

MKS 937B Series Specifications

General

Brand	MKS
Model	937B Series
Category	Controller
Language	English