MKS 937B Operation Manual
61
Pressure, Torr Buffered Vout, V Pressure, Torr Buffered Vout, V
1.0E-11 0.0000 4.0E-07 6.8993
1.5E-11 0.3286 6.0E-07 7.0871
2.0E-11 0.5634 8.0E-07 7.2222
3.0E-11 0.8994 1.0E-06 7.3247
4.0E-11 1.1416 1.5E-06 7.5140
6.0E-11 1.4585 2.0E-06 7.6551
8.0E-11 1.7035 3.0E-06 7.8469
1.0E-10 1.8882 4.0E-06 7.9769
1.5E-10 2.3241 6.0E-06 8.1714
2.0E-10 2.6299 8.0E-06 8.3064
3.0E-10 2.9358 1.0E-05 8.4136
4.0E-10 3.1342 1.5E-05 8.6166
6.0E-10 3.4587 2.0E-05 8.7446
8.0E-10 3.6700 3.0E-05 8.9177
1.0E-09 3.8409 4.0E-05 9.0275
1.5E-09 4.1006 6.0E-05 9.1665
2.0E-09 4.2838 8.0E-05 9.2614
3.0E-09 4.5248 1.0E-04 9.3297
4.0E-09 4.6807 1.5E-04 9.4255
6.0E-09 4.8991 2.0E-04 9.4826
8.0E-09 5.0452 3.0E-04 9.5605
1.0E-08 5.1579 4.0E-04 9.6076
1.5E-08 5.3563 6.0E-04 9.6708
2.0E-08 5.4924 8.0E-04 9.7034
3.0E-08 5.6809 1.0E-03 9.7325
4.0E-08 5.8185 1.5E-03 9.7703
6.0E-08 6.0096 2.0E-03 9.7975
8.0E-08 6.1423 3.0E-03 9.8340
1.0E-07 6.2431 4.0E-03 9.8575
1.5E-07 6.4281 6.0E-03 9.8823
2.0E-07 6.5683 8.0E-03 9.8997
3.0E-07 6.7570 1.0E-02 9.9178
Table 8-4 Buffered analog output for the cold cathode gauges (421/422/423) in N
2
. This is 2.4
higher than the raw analog output as shown in Table 8-5.
Range Equation
V<2.2V
)4259.09901.03941.33546.25exp(
32
VVVP
2.2 V< V <3.71 V
¸
¹
·
¨
©
§
1969.0
7722.5
exp
V
P
V>3.71 V
¸
¹
·
¨
©
§
V
V
P
0721557.03161.0
2157.4
exp
Table 8-5 Equations for Cold Cathode gauges (N
2
) raw analog output.
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