MKS 937B Series User Manual

MKS 937
B
B
Operation M
a
1
C
h
2
L
E
3
Li
q
4
P
u
5
P
o
6
A
I
O
7
AC
8
R
S
9
R
e
10
An
11
C
o
12
C
o
13
Hi
g
14
C
u
15
Pi
r
16
C
a
a
nual
Figure
h
annel label
E
D, indicating
q
uid Crystal
D
u
sh Buttons f
o
o
wer Switch
O
Module
C
Power Inlet
S
232/485 Co
m
e
lay Output P
o
n
alog Output
P
o
mmunicatio
n
o
ld Cathode
M
g
h Voltage B
N
u
rrent BNC c
o
r
ani Module
a
pacitance m
a
3-3 937B e
x
active chann
D
isplay
o
r menu navi
g
m
munication
o
rt
P
ort
n
/Valve Contr
o
M
odule
N
C connecto
r
o
nnector
a
nometer Mo
18
x
ternal dime
n
el
g
ation
Port
o
l Module
r
dule
n
sions (inch
e
e
s).

MKS 937B Series Specifications

General

Brand	MKS
Model	937B Series
Category	Controller
Language	English