MKS 937B Series User Manual

MKS 937
B
7.3.6
P
Remove
t
the conn
e
Sensor c
a
A
new 31
7
7.4 C
a
The Seri
e
Baratron
s
Capacita
n
diaphrag
m
scale ran
g
See an M
manomet
e
m
7.4.1 I
n
Capacita
n
placed a
s
sensing d
(VCR
®
,
c
s
t
h
7.4.2
C
A
capacit
a
module h
a
shown in
B
Operation M
a
P
reparing
t
he cable fro
m
e
ctor/electron
a
n be baked
u
7
with alumin
a
pacitan
c
e
s 937B Cont
r
s
®
(622A, 623
A
n
ce manome
t
m
. Baratrons
a
g
es from 0.0
2
KS Baratron
e
rs.
Do not
m
ay damage
t
n
stalling
a
n
ce Manome
t
s
ystem with t
h
iaphragm. A
n
ompression,
Due to
t
i
ngle or dou
b
h
e pressure
s
C
onnectin
a
nce manom
e
a
s two femal
e
Table 7-4.
Ta
b
a
nual
the 317 S
m
the Sensor.
ics subasse
m
u
p to 150°C
a
um housing
R
c
e Mano
m
r
oller support
A
, 626A, 722
t
ers measure
a
re widely u
s
2
to 20,000 T
o
instruction m
connect he
a
t
he Baratro
n
a
Baratro
n
t
ers may be
m
h
e Px port fa
c
n
y standard v
KF flange, et
c
t
he failure o
f
b
le metal fe
r
s
ensor, MK
S
g a Barat
r
e
ter head is
c
e
, 9-pin "D" c
o
b
le 7-4 Pin
o
ensor for
Using a #1
P
m
bly separati
n
a
nd the Shiel
d
R
F shielding
c
m
eters -
M
s a number
o
A ), and MK
S
pressure dir
e
ed owing to t
o
rr, each wit
h
anual for co
m
a
ted Baratro
n
n
Module.
n
Capacit
a
m
ounted in a
n
c
ing down to
acuum fitting
c
.). The sens
f
many user
s
r
rule compr
e
S
does not
w
r
on™ Ca
p
c
onnected to
o
nnectors. T
o
ut of the 9
p
54
Bakeout
P
hillips screw
n
g it from the
d
ed Convecti
o
c
an be bake
d
M
KS Bar
a
o
f capacitanc
e
S
45 C heate
d
e
ctly by mea
s
heir accurac
y
h
a 3-decade
m
plete inform
a
n
s with cont
r
a
nce Man
n
y position, h
o
allow conta
m
may be use
d
or port will e
a
s
to follow t
h
e
ssion vacu
u
w
arrant this
p
p
acitance
the module
w
he Pin assig
n
p
in D-Sub c
o
w
driver, remo
v
Sensor. The
o
n Pirani Se
n
d
to 250°C.
a
tron
e
manometer
s
d
Baratrons
®
(
s
uring the de
f
y
and reliabili
t
range.
a
tion on usin
g
r
olled temp
e
omete
r
o
wever, it is r
m
ination to fall
d
to connect t
a
sily carry th
e
h
e proper ti
g
u
m fittings a
n
p
roduct whe
n
Manome
t
w
ith a multico
n
n
ment for the
o
nnector on
v
e the two sc
r
standard Co
n
n
sor can be b
s
, including t
h
(
624B,D24B,
f
lection of a t
h
t
y. They are
a
g
these capa
c
e
ratures hig
h
r
ecommende
d
away from t
h
t
he Baratron
t
e
weight of th
e
g
htening pro
c
n
d the resul
t
n
such fittin
g
t
e
r
n
ductor shiel
d
9-pin D-Sub
CM module.
r
ews at the e
n
n
vection Pira
n
aked up to 1
0
h
e MKS unh
e
627B,D27B)
.
h
in Inconel
®
a
vailable in f
u
c
itance
h
er than 45
o
C
d
that they b
e
h
e pressure
t
o the system
e
transducer.
c
edures for
t
ing damage
g
s are used.
d
ed cable. T
h
connector is
n
d of
n
i
0
0°C.
e
ated
.
u
ll
C
. It
e
to
h
e

MKS 937B Series Specifications

General

Brand	MKS
Model	937B Series
Category	Controller
Language	English