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MKS 649B User Manual

MKS 649B
90 pages
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1023590-001
Rev B, 07/08
MKS Type 649B
(ROHS Compliant)
Pressure Controller
with an Integral Mass Flow Meter
Instruction Manual

Table of Contents

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MKS 649B Specifications

General IconGeneral
BrandMKS
Model649B
CategoryController
LanguageEnglish

Summary

Safety Information

Symbols Used in This Instruction Manual

Defines WARNING, CAUTION, and NOTE messages used in the manual.

Symbols Found on the Unit

Describes the meaning of symbols marked on the unit itself.

Chapter One: General Information

Introduction

Provides an overview of the MKS Type 649B controller, its features, and capabilities.

Design Features of the Integral Mass Flow Meter

Details the advanced flow sensor and bypass design for accurate measurements.

Customer Support

Information on obtaining service, repair, and contacting MKS for assistance.

Chapter Two: Installation

How To Unpack the Type 649 Unit

Steps for safely unpacking and inspecting the unit upon receipt.

Interface Cables

Details cable types, model codes, and ordering information for connecting the controller.

Product Location and Requirements

Specifies ventilation, operating temperature, pressure, and power requirements for installation.

Setup

Covers fittings, mounting hardware, and gas pressure considerations for installing the controller.

Installing the Unit

Instructions for connecting the controller for downstream pressure control.

Electrical Information

Details the I/O connector pinout and functionality for system integration.

Initial Configuration

Lists the factory default settings for pressure control, set point, flow, and trip points.

Chapter Three: Overview

General Information

Describes user adjustable controls and test jacks on the unit.

Pressure Control Range

Explains the operational pressure control range of the 649 controller.

Flow Measurement Overview

Describes how the controller measures mass flow rate using a thermal technique.

Tuning the 649 Pressure Controller

Details how to adjust Proportional (P) and Integral (I) terms for optimal system response.

Priority of Commands

Details the hierarchy of commands and their precedence in controlling the unit.

Trip Points

Describes the two trip points, their operation, and connection to external relays.

Chapter Four: Operation

How To Check the Pressure Transducer Zero

Instructions for checking and setting the pressure transducer zero for accurate readings.

How To Adjust the Pressure Transducer Span

Instructions for adjusting the pressure transducer span using a calibration standard.

How To Tune the 649 Controller

Guide to optimizing controller performance by adjusting P and I parameters for system stability.

How To Adjust the Trip Point Values

Instructions for measuring and adjusting trip point values using a digital voltmeter.

How To Change the Pressure Output Signal Range

Instructions to change the pressure output and set point signal range via internal jumpers.

Chapter Five: Maintenance

Zero Adjustment

Instructions for checking and resetting the zero for the pressure transducer and flow meter.

Appendix A: Product Specifications

Performance Specifications

Details accuracy, repeatability, leak integrity, and temperature coefficients of the unit.

Physical Specifications

Lists burst pressure, dimensions, fittings, ranges, power, and materials used in the unit.

Environmental Specifications

Specifies ambient and storage temperature and humidity ranges.

Trip Point Specifications

Details trip point characteristics like rated current, state, hysteresis, and settings.

Appendix B: Model Code Explanation

Model Code

Explains how the model code identifies the specific options and configuration of the unit.

Gas Code (GGG)

Lists ordering codes for different gases supported by the unit.

Flow Rate Full Scale (YYY)

Lists ordering codes for various full-scale flow rates.

Appendix C: Valve Orifice Selection

General Information

Information on valve orifice sizes and their importance for application matching.

How To Verify the Orifice Selection

Instructions for verifying the correct valve orifice size based on pressure and flow rates.

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