MKS 649B - Appendix A: Product Specifications; Performance Specifications

Appendix A: Product Specifications Performance Specifications
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Appendix A: Product Specifications
Performance Specifications
Accuracy
Pressure Transducer
Pressure Controller
Mass Flow Meter
±0.5% Reading
2
≤ ±0.1% F.S.
3
±1.0% F.S.
2
typical
CE Compliance
Electromagnetic Compatibility
4
EMC Directive 89/336/EEC
Control Adjustments
Integral
Proportional
10 positions (0 through 9)
8 positions (0 through 7; positions 8 and 9 repeat
settings 0 and 1)
Control Repeatability
±0.2% F.S.
Leak Integrity
Internal to external
Through closed
metal or Kel-F valve
Through closed
elastomer valve
<10
-9
scc/sec He
<2% F.S. (N2 at 25 psia [172 kPa] to atm.
differential)
<1 x 10
-3
scc/sec He
Maximum Operating Differential Pressure
150 psia [1034 kPa]
5
Pressure Control Range 5 to 100% F.S.
Resolution (measurement)
≤0.1% F.S.
Temperature Coefficient
Zero
±
Span
±
Pressure Flow
≤
±0.04% F.S./°C ≤ ±0.05% F.S./°C
≤ ±0.04% Reading/°C ≤ ±0.08% Reading/°C
Warm Up Time 5 minutes
2
Includes controller error, linearity, hysteresis, and repeatability.
3
Includes the controller error only.
4
An overall metal braided shielded cable, properly grounded at both ends, is required during use.
5
Consistent with the overpressure limit of the transducer.