MKS 653B - User Manual

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117082-P1

Rev D, 1/98

Instruction Manual

MKS Type 653B

Exhaust Throttle Valve

Six Shattuck Road

Andover, MA 01810-2449

(800) 227-8766 or (978) 975-2350

Fax: (978) 975-0093

E-mail: mks@mksinst.com

Web site: http://www.mksinst.com

Main Page

Table of Contents5
Valve Safety Information9
Symbols Used in this Instruction Manual9
Symbols Found on the Unit10
Table 1: Definition of Symbols Found on the Unit10
Safety Procedures and Precautions11
Chapter One: General Information13
Introduction13
How this Manual Is Organized14
Customer Support14
Chapter Two: Installation15
How to Unpack the Type 653 Unit15
Unpacking Checklist15
Environmental Requirements16
Setup16
Choosing a Pressure Controller17
Flange Types17
Figure 1: Outline Dimensions of the Motor Driver Assembly17
ASA Series Flanges18
Figure 2: Outline Dimensions of an ASA Series Flange18
Table 2: Size Options for ASA Series Flanges18
CF Series Flanges19
Figure 3: Outline Dimensions of a CF Series Flange19
Table 3: Size Options for CF Series Flanges19
ISO-NW Series Flanges20
Figure 4: Outline Dimensions of an ISO-NW Series Flange20
Table 4: Size Options for ISO-NW Series Flanges20
JIS Series Flanges21
Figure 5: Outline Dimensions of a JIS Series Flange21
Table 5: Size Options for JIS Series Flanges21
KF Series Flanges22
Figure 6: Outline Dimensions of a KF Series Flange22
Table 6: Size Options for KF Series Flanges22
Interface Cables23
Table 7: Interface Cables23
Generic Shielded Cable Description24
Interface Connector25
Table 8: Interface Connector Pinout25
Chapter Three: Operation27
Theory of Operation27
General Operation Information28
Chapter Four: Maintenance29
General Information29
Safety Precautions29
Cleaning the Valve30
Appendix A: Product Specifications31
General Specifications31
Appendix B: ASA Series Flange Specifications33
Appendix C: ISO-NW Series Flange Specifications35
Appendix D: CF Series Flange Specifications37
Appendix E: JIS Series Flange Specifications39
Index41

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MKS 653B Specifications

General

Brand	MKS
Model	653B
Category	Controller
Language	English

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