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MKS G Series User Manual

MKS G Series
113 pages
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1046210-001, Rev A
January, 2013
MKS G-Series
Digital
Mass Flow Controllers
Instruction Manual

Table of Contents

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MKS G Series Specifications

General IconGeneral
FirmwareMarlin
DriverDRV8825
Voltage Input12-24V DC
Output Voltage5V
Communication InterfaceUSB, UART

Summary

Mass Flow Device Safety Information

Symbols Used in This Instruction Manual

Defines WARNING, CAUTION, and NOTE messages used in the manual.

Symbols Found on the Unit

Describes symbols that may appear on the device itself.

Safety Procedures and Precautions

Outlines general safety precautions for instrument operation.

Chapter One: General Information

Introduction

Introduces the G-Series MFC product line and manual organization.

Design Features

Highlights benefits like increased throughput, accuracy, and cost reduction.

Easy to Integrate and Operate

Discusses straightforward integration via Ethernet and ease of operation.

Control (I/O) Interfaces

Details available analog and digital I/O options for control.

How This Manual is Organized

Explains the structure and content of the manual.

Customer Support

Provides contact information for calibration and service centers.

Chapter Two: Overview

General Information

Describes the typical configuration of a flow control system using MFCs.

Flow Measurement Overview

Explains the process of measuring mass flow rate.

Flow Path

Details the path of gas through the MFC from inlet to outlet.

Flow Control Range

Specifies the controllable full-scale flow ranges for MFCs.

Measurement Technique

Explains the differential heat transfer method used for flow measurement.

Control Circuitry and Valve

Details on controller electronics and control valve.

How the MFC Works

Explains the MFC's technology, algorithms, and operation.

Operation with Non-Nitrogen Gases

Discusses using pre-stored gas parameters for non-Nitrogen gases.

Chapter Three: Installation and Configuration

Unpacking and Requirements

Instructions for unpacking and product location/environmental needs.

Mounting Hardware and Procedure

Details mounting specifications and step-by-step installation guide.

Chapter Four: Analog and Digital Interfaces

Analog I/O Interface Details

Information on analog I/O interface cables and options.

Analog MFC Start-up

Procedures for analog MFC start-up, warm-up, zeroing, and valve override.

Digital Interface Overview

Introduction to Ethernet, DeviceNet, Profibus, and RS485 interfaces.

Chapter Five: Ethernet Interface Setup and Configuration

Step 1: Install Java Plug-in

Procedure to install the Java plug-in required for the web interface.

Step 2: Setup Network Communication

Provides options for establishing Ethernet network communication.

Chapter Six: Embedded Web-Based GUI and Diagnostics

Logging On to Your MFC

Steps to access the MFC's web interface after network setup.

Monitor Mode Operations

Covers logging on, monitor mode, device page, plot page, and config page.

Setup Mode Operations

Covers entering setup mode, device/plot/config pages, and creating gas instances.

Key Configuration and Maintenance

Changing flow range, gas instances, and updating firmware.

Zeroing and Diagnostics

Procedures for zeroing the MFC and running diagnostic tests.

Chapter Seven: Maintenance

General Maintenance Information

General advice on checking cables and enclosures for wear and damage.

Recalibration and Zero Adjustment

Recommendations for recalibration and zero adjustment procedures.

Chapter Eight: Troubleshooting

Troubleshooting Chart

A table listing symptoms, possible causes, and corrective actions.

Appendix A: Product Specifications

Performance Specifications

Detailed performance parameters for MFC models.

Mechanical Specifications

Physical dimensions, materials, and fittings of MFCs.

Electrical Specifications

Electrical input, output, and communication details for MFCs.

Appendix B: Model Code Explanation for GE50A & GV50A

Model Code Structure

Explains the overall model code format and its components.

Component Code Details

Details specific codes for flow range, fittings, connectors, seals, and firmware.

Appendix C: Model Code Explanation for GM50A

Model Code Structure

Explains the overall model code format and its components.

Component Code Details

Details specific codes for flow range, fittings, connectors, valve type, and firmware.

Appendix D: Outline Drawings

GE50A/GM50A MFC Drawings

Provides dimensional drawings for GE50A and GM50A MFC/MFM units.

GV50A MFC Drawings

Provides dimensional drawings for the GV50A MFC with integral shut-off valve.

Appendix D: Health and Safety Form

HEALTH AND SAFETY FORM

A form required for equipment returns for service or repair.

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