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MKS G Series User Manual
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1046210-001, Re
v A
January, 2013
MKS G-Series
Digital
Mass Flow Controllers
Instruction Manual
2
Table of Contents
Table of Contents
5
List of References
9
Mass Flow Device Safety Information
11
Symbols Used in this Instruction Manual
11
Symbols Found on the Unit
11
Safety Procedures and Precautions
11
Table 1: Definition of Symbols Found on the Unit
11
Sicherheitshinweise für das Massenflussgerät
13
In dieser Betriebsanleitung Vorkommende Symbole
13
Erklärung der am Gerät Angebrachten Symbole
13
Sicherheitsvorschriften und Vorsichtsmaßnahmen
13
Tabelle 2: Bedeutung der am Gerät Angebrachten Symbole
13
Informations de Sécurité Pour Appareils de Mesure/Contrôle de Débit Massique
15
Symboles Utilisés Dans Ce Manuel D'utilisation
15
Symboles Figurant Sur L'unité
15
Mesures de Sécurité Et Précautions
15
Tableau 3: Définition des Symboles Sur L'unité
15
Medidas de Seguridad del Dispositivo de Flujo de Masa
17
Símbolos Usados en Este Manual de Instrucciones
17
Símbolos Hallados en la Unidad
17
Procedimientos y Precauciones de Seguridad
17
Tabla 4: Definición de Los Símbolos Hallados en la Unidad
17
マスフロー機器の安全に関する情報
19
本取扱説明書のマーク
19
本機器のマーク
19
表 5: 本機器に使⽤されているマークについて
19
安全対策について
20
질량 유량 장치 안전 정보
23
본 지침 매뉴얼에 사용되는 기호들
23
장치에 표시된 기호들
23
표 6: 장치에 표시된 기호들의 정의
23
안전 절차 및 예방조치
24
Chapter One: General Information
27
Introduction
27
How this Manual Is Organized
28
Customer Support
29
Chapter Two: Overview
31
General Information
31
How the MFC Works
32
Operation of the MFC with Gases Other than Nitrogen
32
Chapter Three: Installation and Configuration
34
Unpacking
34
Product Location and Requirements
35
Product Dimensions
35
GE50A and GM50A - See Appendix C
35
GV50A - See Appendix D
35
Mounting Hardware
36
Installation Procedure
36
Figure 1: Serial Number Label (Sample)
36
Chapter Four: Analog and Digital Interfaces
39
Analog I/O Interface Cables
39
Table 7: MKS Interface Cables
39
Analog Interface Input and Output Options
40
Table 8: Analog Interface Voltage I/O (0 to 5 VDC) - 9 Pin D Male Pinouts - Model Code a
40
Table 9: Analog Interface Voltage I/O (0 to 5 VDC) - 15 Pin D Male Pinouts - Model Code B
41
Digital Interface Input and Output Options
43
Figure 2: Devicenet Connector Pin Diagram
43
Table 10: Digital Interface - Devicenet Connector Pinout - Model Code 6
43
Figure 3: Devicenet Top View
44
Table 11: Network (NET) Status LED Indicators
44
Figure 4: Devicenet Baud Rate Switch
45
Figure 5: Devicenet MAC ID Switches
45
Table 12A: Profibus 9 Pin D Male Power Connector- Model Code 4
47
Figure 6: Profibus Top View
48
Table 12B: Profibus 9 Pin D Female Communications Connector - Model Code 4
48
Figure 7: Profibus Station Address Switches
49
Table 13: Digital Interface - RS485 Using 9 Pin D - Model Code 5
50
Table 14: RS485 Module Status LED Indicators
50
Figure 8: RS485 Top View
51
Chapter Five: Ethernet Interface Setup and Configuration
54
Step 1: Install the Java™ Plug-In (for Single IP Address)
54
Step 2: Setup Network for Communication through Ethernet
55
Chapter Six: Embedded Web-Based GUI and Diagnostics
64
Logging on to Your MFC
64
Monitor Mode
64
Figure 9: Embedded GUI, MFC Device Page in Monitor Mode
65
Figure 10: Embedded GUI, Plot Page in Monitor Mode
66
Figure 11: Embedded GUI, Configuration Page in Monitor Mode
67
Figure 12: Embedded GUI, RS485 Comm Page in Monitor Mode
68
Setup Mode
69
Figure 13: Setup Mode (Configuration Page)
69
Figure 14: Embedded GUI, Device Page in Setup Mode
70
Figure 15: Embedded GUI, Creating a New Gas Instance
71
Figure 16: Changing the Full Scale Flow Range
71
Figure 17: Embedded GUI, Plot Page in Setup Mode
72
Figure 18: Embedded GUI, Configuration Page in Setup Mode
73
Figure 19: Embedded GUI, RS485 Comm Page in Setup Mode
75
Figure 20: Embedded GUI, Diagnostics Page in Setup Mode
76
Chapter Seven: Maintenance
78
General Information
78
Recalibration
78
Flow Zero Adjustment
78
Chapter Eight: Troubleshooting
83
Troubleshooting Chart
83
Table 15: Troubleshooting Chart
83
Appendix A: Product Specifications
89
Performance Specifications - GE50A/GV50A/GM50A
89
Specifications Are Subject to Change Without Notice.mechanical Specifications - GE50A/GV50A/GM50A
89
Electrical Specifications for GE50A, GM50A and GV50A
90
Appendix B : Model Code Explanation for GE50A & GV50A
94
Model Code Description - Elastomer Sealed Products
94
Appendix C: Model Code Explanation for GM50A
100
Model Code Description - GM50A - Metal Sealed Products
100
Appendix D : Outline Drawings
106
GE50A MFC and GM50A MFC/MFM
106
GV50A MFC W/ Integral Shut-Off Valve
109
Appendix D: Health and Safety Form
112
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MKS G Series Specifications
General
Firmware
Marlin
Driver
DRV8825
Voltage Input
12-24V DC
Output Voltage
5V
Communication Interface
USB, UART
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