Table of Contents
i
Table of Contents
List of References ............................................................................................................................................... v
Mass Flow Device Safety Information ............................................................................................................. 1
Symbols Used in This Instruction Manual .................................................................................................................... 1
Symbols Found on the Unit ........................................................................................................................................... 1
Safety Procedures and Precautions ................................................................................................................................ 1
Sicherheitshinweise für das Massenflussgerät................................................................................................. 3
In dieser Betriebsanleitung vorkommende Symbole ..................................................................................................... 3
Erklärung der am Gerät angebrachten Symbole ............................................................................................................ 3
Sicherheitsvorschriften und Vorsichtsmaßnahmen ....................................................................................................... 3
Informations de sécurité pour appareils de mesure/contrôle de débit massique ......................................... 5
Symboles utilisés dans ce manuel d'utilisation .............................................................................................................. 5
Symboles figurant sur l'unité ......................................................................................................................................... 5
Mesures de sécurité et précautions ................................................................................................................................ 5
Medidas de seguridad del dispositivo de flujo de masa .................................................................................. 7
Símbolos usados en este manual de instrucciones ......................................................................................................... 7
Símbolos hallados en la unidad ..................................................................................................................................... 7
Procedimientos y precauciones de seguridad ................................................................................................................ 7
マスフロー機器の安全に関する情報 .............................................................................................................. 9
本取扱説明書のマーク ............................................................................................................................................... 9
本機器のマーク ........................................................................................................................................................... 9
安全対策について ..................................................................................................................................................... 10
질량 유량 장치 안전 정보 ................................................................................................................................ 13
본 지침 매뉴얼에 사용되는 기호들 ......................................................................................................................... 13
장치에 표시된 기호들 ............................................................................................................................................... 13
안전 절차 및 예방조치 .............................................................................................................................................. 14
Chapter One: General Information .............................................................................................................. 17
Introduction ................................................................................................................................................................. 17
How This Manual is Organized ................................................................................................................................... 18
Customer Support ........................................................................................................................................................ 19
Chapter Two: Overview ................................................................................................................................. 21
General Information .................................................................................................................................................... 21
How the MFC Works .................................................................................................................................................. 22
Operation of the MFC with Gases other than Nitrogen ............................................................................................... 22
Chapter Three: Installation and Configuration ........................................................................................... 24
Unpacking ................................................................................................................................................................... 24
Product Location and Requirements ............................................................................................................................ 25
Product Dimensions .................................................................................................................................................... 25
GE50A and GM50A – See Appendix C ...................................................................................................................... 25
GV50A – See Appendix D .......................................................................................................................................... 25
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