Mass Flow Device Safety Information
1
Mass Flow Device Safety Information
Symbols Used in This Instruction Manual
Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual.
Warning
The WARNING sign denotes a hazard. It calls attention to a procedure, practice,
condition, or the like, which, if not correctly performed or adhered to, could result
in injury to personnel.
Caution
The CAUTION sign denotes a hazard. It calls attention to an operating procedure,
practice, or the like, which, if not correctly performed or adhered to, could result in
damage to or destruction of all or part of the product.
Note
The NOTE sign denotes important information. It calls attention to a procedure, practice,
condition, or the like, which is essential to highlight.
Symbols Found on the Unit
The following table describes symbols that may be found on the unit.
Table 1: Definition of Symbols Found on the Unit
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On (Supply)
IEC 417, No. 5007
Off (Supply)
IEC 417, No. 5008
Earth (ground)
IEC 417, No. 5017
Protective Earth (ground)
IEC 417, No. 5019
Frame or Chassis
IEC 417, No. 5020
Equipotentiality
IEC 417, No. 5021
Direct Current
IEC 417, No. 5031
Alternating Current
IEC 417, No. 5032
Both Direct and Alternating Current
IEC 417, No. 5033-a
Class II Equipment
IEC 417, No. 5172-a
Three Phase
Alternating Current
IEC 617-2, No. 020206
Caution (refer to accompanying
documents)
ISO 3864, No. B.3.1
Caution, Risk of Electric Shock
ISO 3864, No. B.3.6
Caution, Hot Surface
IEC 417, No. 5041
Safety Procedures and Precautions
Observe the following general safety precautions during all phases of operation of this instrument.
Failure to comply with these precautions or with specific warnings elsewhere in this manual violates
safety standards of intended use of the instrument and may impair the protection provided by the
equipment. MKS Instruments, Inc. assumes no liability for the customer’s failure to comply with these
requirements.
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