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MKS Mass-Flo 1500 Series - User Manual

MKS Mass-Flo 1500 Series
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114173-P1
Rev D, 9/96
Instruction Manual
MKS Type 1500 Series
Mass-Flo
®
Controller
Six Shattuck Road
Andover, MA 01810-2449
(800) 227-8766 or (978) 975-2350
Fax: (978) 975-0093
E-mail: mks@mksinst.com
Web site: http://www.mksinst.com

Questions and Answers

  • D
    David MooreAug 14, 2025
    What to do if the MKS Mass-Flo 1500 Controller does not track the set point?
    • R
      Rachel CherryAug 15, 2025
      If your MKS Controller isn't tracking the set point, it might be due to an improper zero adjustment. To resolve this, zero the meter output as described in the Warm Up and Start Up guide on page 19.
  • P
    petersonjanetAug 17, 2025
    What to do if the MKS Mass-Flo 1500 Controller does not function?
    • M
      Michael KennedyAug 18, 2025
      If the MKS Controller isn't functioning, it may be due to malfunctioning electronics. You can try to readjust the valve and disconnect the valve override. If this doesn't solve the issue, return it for service.
  • B
    Brandon ObrienAug 21, 2025
    What to do if the MKS Controller indicates approximately twice the known flow and is unstable?
    • N
      Natalie AdamsAug 21, 2025
      If your MKS Controller unit indicates approximately twice the known flow and is unstable, reinstall the unit in the proper flow direction.
  • P
    Paul YoungAug 25, 2025
    How to stop oscillation in MKS Mass-Flo 1500 Controller?
    • A
      Ashlee HancockAug 26, 2025
      If your MKS Controller exhibits oscillation, reduce the upstream pressure, check the manufacturer's specifications, and reduce the flow by turning counter-clockwise. You can also install a 150 to 1000 ohm resistor in series with the set point input line.
  • Y
    Yvonne HardyAug 28, 2025
    Why MKS Controller unit exhibits large zero temp. coefficient?
    • M
      Michelle McdonaldAug 28, 2025
      If the MKS Controller unit exhibits a large zero temp. coefficient because the ambient heater is out of regulation, check the placement of the flow meter in the hot system and return for service.
  • C
    Caleb MasseyAug 31, 2025
    What to do if MKS Mass-Flo 1500 has no output, or over-range at zero (after warm-up)?
    • D
      Diana DanielsSep 1, 2025
      If your MKS Controller has no output, or over-range at zero after warm-up, the electronics may be malfunctioning. Check the cable type and return the device for service.
  • S
    Steven BallSep 3, 2025
    What to do if MKS Mass-Flo 1500 Controller is over-range at zero (after warm-up)?
    • M
      Megan SmithSep 3, 2025
      If the MKS Controller is over-range at zero after warm-up, it may be caused by malfunctioning electronics. Isolate the flow instrument and return it for service.
  • B
    Beth WilliamsSep 7, 2025
    Why MKS Mass-Flo 1500 unit is non-linear or has erratic operation?
    • A
      andradesamanthaSep 7, 2025
      If your MKS Controller unit is non-linear or has erratic operation, it could be due to the heater winding being out of regulation. Return the unit for service.
  • T
    Trevor GutierrezSep 10, 2025
    What to do if MKS Mass-Flo 1500 Controller unit produces large pressure drop or will not pass full flow?
    • P
      phamlauraSep 10, 2025
      If the MKS Controller unit produces a large pressure drop or will not pass full flow, return it for service.

MKS Mass-Flo 1500 Series Specifications

General IconGeneral
BrandMKS
ModelMass-Flo 1500 Series
CategoryController
LanguageEnglish

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