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MKS 937B User Manual

MKS 937B
131 pages
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MKS Series 937B
High Vacuum
Multi-Sensor System
Operation and Maintenance Manual
(Firmware V1.01)
Part #: 100016467
Note: FC, and Pressure control functions are not available in FW V1.00.

Table of Contents

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MKS 937B Specifications

General IconGeneral
Channels1
CommunicationRS-232, RS-485
DisplayLCD
Weight2.5 kg
Baud Rate9600
Power24 VDC
TypePressure Controller
Operating Temperature0 to 50 °C

Summary

1 Safety Information

1.1 Symbols Used in this Manual and their definitions

Explains symbols and their meanings used in the manual.

1.2 Safety Precautions and Procedures

Outlines essential safety procedures and general precautions for operating the instrument.

2 Specifications

2.1 Controller Specifications

Details the technical specifications for the 937B controller unit itself.

2.2 Sensor Specifications

Lists specifications for the various types of vacuum sensors compatible with the system.

2.3 Controller Display Messages

Explains the various messages displayed on the 937B controller's LCD screen.

3 Feature and Control Locations

3.1 Front Panel Controls and Indicators

Identifies controls and indicators on the front panel of the 937B controller.

3.2 Rear Panel Connectors

Identifies connectors and ports on the rear panel of the 937B controller.

4 Typical Applications

4.1 Series 937B Controller Applications

Outlines common uses and applications of the 937B controller in vacuum systems.

5 HPS® Products Series 937B System Overview

5.1 System Features and Capabilities

Provides an overview of the system's capabilities and supported sensors.

6 Operating the Series 937B Controller

6.1 Power Management

Instructions on how to turn the controller on and off safely.

6.2 Front Panel Lock

Explains how to lock and unlock front panel controls to prevent accidental changes.

6.3 Front Panel Display

Details the controller's LCD display modes and information presented.

6.4 System Setup Configuration

Configuration settings for the controller's operation and communication.

6.5 Pressure Channel Setup

How to configure individual pressure sensor channels.

6.6 Pressure Sensor Power Control

Managing power to pressure sensors and their degas functions.

6.7 Leak Testing Procedures

Procedures and principles for performing leak tests with the controller.

6.8 Flow Channel Setup

Configuring channels for mass flow controllers (MFCs).

6.9 Pressure Control Using a Valve

Setting up pressure control via external control valves.

7 Installing Vacuum Sensors

7.1 Cold Cathode Sensor Installation

Covers locating, orienting, connecting, and managing contamination for cold cathode sensors.

7.2 Hot Cathode Sensor Installation

Guidelines for locating, preventing contamination, orienting, and connecting hot cathode sensors.

7.3 Pirani Sensor Installation

Covers locating, preventing contamination, orienting, connecting, and bakeout prep for Pirani sensors.

7.4 Capacitance Manometer Installation

Procedures for installing MKS Baratron capacitance manometers.

8 Connecting Relay and Analog Outputs

8.1 Relay Output Connections

Covers pin assignments, proper relay setting, and handling inductive loads for relay outputs.

8.2 Analog Output Signals

Explains buffered, logarithmic, linear, and combined analog output signals and their configurations.

9 RS232/485 Serial Communication Commands

9.1 Communication Protocols

Details the RS232/485 communication protocols and wiring diagrams.

9.2 Pressure Reading Commands

Lists serial commands for reading pressure values from various sensors.

9.3 Relay and Control Setting Commands

Serial commands for configuring relay and control settings.

9.4 Pirani and Convection Pirani Control Commands

Serial commands specific to Pirani and Convection Pirani sensors.

9.5 Cold Cathode Control Commands

Serial commands for controlling cold cathode sensors.

9.6 Hot Cathode Control Commands

Serial commands for controlling hot cathode sensors.

9.7 MFC Control Commands

Serial commands for controlling Mass Flow Controllers (MFCs).

9.8 Pressure (Valve) Control Commands

Serial commands for controlling system pressure via valves.

9.9 PID Recipe Commands

Serial commands related to PID control recipes.

9.10 System Commands

Serial commands for general system settings and queries.

10 937A Emulated Operation and Serial Commands

10.1 937A Emulated Operation Mode

How to operate the 937B in 937A emulation mode for compatibility.

10.2 Communication Protocols and Commands

Details communication protocols and serial commands for 937A emulation.

11 Controller Module Maintenance

11.1 Sensor Module Installation and Removal

Procedures for removing and installing sensor modules.

11.2 AIO Module Installation and Removal

Instructions for removing and installing the AIO module.

11.3 Communication Module

Information about the communication module.

11.4 Power Supply

Details about the controller's power supply unit.

11.5 Controller Mounting

Guidelines for rack and benchtop mounting of the 937B controller.

11.6 AC Power Cord

Information on selecting and using the AC power cord.

12 Sensor Maintenance and Service

12.1 Cold Cathode Sensor Maintenance

Covers cold cathode sensor theory, disassembly, cleaning, assembly, bakeout prep, and testing.

12.2 I-MAG® Cold Cathode Sensor Maintenance

Details connecting, disassembling, cleaning, assembling, and bakeout preparation for I-MAG sensors.

12.3 Hot Cathode Sensor Maintenance

Covers hot cathode sensor theory, cleaning, and testing procedures.

12.4 Pirani Sensor Maintenance

Explains Pirani sensor theory, cleaning, and testing for Series 317/345.

12.5 Capacitance Manometer Maintenance

Covers capacitance manometer theory and repair recommendations.

13 Spare Parts and Accessories

13.1 Parts List

Lists available spare parts and accessories for the 937B system.

14 Appendix

14.1 Hot Cathode Gauge Gas Correction Factors

Table of gas correction factors for hot cathode gauges.

14.2 MFC Gas Conversion Factors

Table of gas conversion factors for Mass Flow Controllers (MFCs).

15 Product Warranty

15.1 Warranty Terms and Conditions

Details the warranty terms and conditions for the product.

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