MKS 937B - Logarithmic;Linear and Combination Analog Output; Figure 8-7 Buffered Analog Output for Capacitance Manometers

MKS 937B Operation Manual
82
Buffered Capacitance Manometer Analog Output
Pressure, Torr
10
-4
10
-3
10
-2
10
-1
10
0
10
1
10
2
10
3
10
4
Output Voltage, V
0.01
0.1
1
10
0.1
Full Scale Range (Torr)
1.0
10
100
1000
10,000
Figure 8-7 Buffered analog output for capacitance manometers.
8.4 Logarithmic/Linear and combination analog output
Since most of the buffered analog outputs are non-linear, logarithmically linearized or linear analog
outputs are also provided for each individual sensor. However, since the logarithmic/linear analog