MKS 937B - Figure 6-8 Capacitance Manometer Setup Information Displayed on the 937 B LCD Screen

MKS 937B Operation Manual
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3. Range
This parameter is the full-scale pressure range of the capacitance manometer. Valid ranges
are from 1x10
-2
to 2x10
+4
Torr; the default setting is 1000 Torr. The selection of continuous
change in the values for full scale pressure range accommodates the full-scale analog output
(i.e. 10 V) for a manometer with different pressure units (such as a 10 mbar, or 7.5 Torr full-
scale Baratron). In addition, this can be used as a span calibration adjustment. For example,
if a 1000 Torr manometer is +3% off the calibration (output is 10V when pressure is at 1030
Torr), you can enter 1030 Torr as the full scale range to compensate for the offset (this is
identical to span adjustment).
Setup CM Gauge A1
Range
Auto Zero
Relay
Relay 02
Relay 01
1.00E+03
Enable DIR SET SP
ABOVE
Hyst
SET 1.00E+01 9.35E+00
BELOWENABLE 3.00E+01 5.35E+01
NA
Factory Default NO
Manual Zero NO
Message
Box
Auto-detected
Auto-detected
CM Type Input Voltage 10VABS
Figure 6-8 Capacitance manometer setup information displayed on the 937B LCD screen.
4. Factory Default
When YES is selected for Factory Default, the Manual Zero data is removed, and its value is
reset to zero (factory default). The default setting is NO.
On the front panel LCD display, a small U under the gauge type indication (i.e CM) will
disappear if the gauge was manually calibrated before (user calibrated).
5. Auto Zero
This allows the use of either
or to select a valid gauge for autozeroing i.e. - the
Baratron shown in the table below. The available channel is auto-detected. There is an option
of NA which can be selected if Auto Zero is not required. The autozero will be executed only
when
(1) System pressure is less than 10
-5
xP
FS
(5 decades lower then the full scale)
(2) The Baratron reading is between 5x10
-4
xP
FS
and 0.05xP
FS
(0.05% to 5% of the full scale)