MKS 937B - 4 Typical Applications; 4.1 Series 937 B Controller Applications

MKS 937B Operation Manual
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4 Typical Applications for the Series 937B
Controller
 The measurement of pressure in high vacuum chambers.
 Pressure control in high vacuum systems and process sequencing using relay set points.
 Sensing abnormal pressure events and initiating and controlling appropriate security
measures using the relay set points.
 Controlling system pressure by using the analog output as the input to an automatic
pressure controller.
 Starting or stopping system processes using relay set points.
 Measuring backfill pressures.
 Leak testing vacuum systems.
 Controlling acceleration and light source vacuum systems.
 Displaying the flow rates from MFCs, and providing an interface for controlling the MFCs.
 Maintaining accurate system pressure by controlling an upstream solenoid valve or a
downstream throttle valve
 Maintaining accurate system pressure by regulating an MFC flow rate, or multiple MFC
flow rates with fixed ratio.
 Maintaining smooth control of a wide range of pressures through the use of the
combined analog outputs of up to 3 vacuum gauges.