MKS 937B - 2.3 Controller Display Messages

MKS 937B Operation Manual
16
FC <1.9 lb (0.86 kg)
Vacuum Connection
CC KF25, KF40, 2-3/4” CF, 8 VCR
®
-F (1/2”), 1” tubing
LPN 2-3/4” CF (non-rotatable), KF 40
Mini BA KF16, KF25, KF40, 2-3/4” CF, 1-1/3” mini CF, 3/4”,1” OD
tubing
Pirani, CP KF16, KF25, 1/8” NPT-M with 1/2” compression seal,
8 VCR
®
-F, 4 VCR
®
-F, 1-1/3" CF (non-rotatable),
2-3/4” CF (non-rotatable)
CM KF16, 8 VCR
®
-F (1/2”), 8 VCO
®
-F (1/2”),1-1/3” CF (non-
rotatable), ½” tube
2.3 Controller Display Messages
X.X0Eee
Normal pressure for the Pirani, CP, CC, and HC
X.XXXEe
Normal pressure for the Baratron, flow rate for MFC
OVER The pressure is over upper limit (for CC and HC when p > protected
setpoint)
ATM Atmospheric pressure for the Pirani sensor
>1.100Ee
CM pressure is over 10% of the full scale
LO<E-11 The CC pressure is below its lower limit, or no CC gauge is connected
LO<E-10 The HC pressure is below its lower limit
LO<E-04 The Pirani pressure is below its lower limit
LO<E-03 The CP pressure is below its lower limit
OFF The HC filament is off, or the CC high voltage is off
WAIT CC and HC startup delay
LowEM The HC off due to low emission current
CTRL_OFF The HC or CC are turned off by the control channel
PROT_OFF The HC or CC are in a protected state
RP_OFF The sensor power is turned off remotely
REDETECT Detecting the sensor type for PR/CP
MISCONN A sensor is improperly connected, or there is a broken filament (Pirani, CP,
CM, HC, FC)
_ _ _ _ No Pirani/CP sensor is detected on the inserted Pirani/CP board
NOBOARD No board is detected in the slot, display only last 5 secs
N2, AR, He Gas type