MKS 937B - Default Chapter; Table of Contents

MKS 937B Operation Manual
2
Table of Contents
Package Contents ..................................................................................................................................7
1 Safety Information .....................................................................................................................8
1.1 Symbols Used in this Manual and their definitions..........................................................8
1.2 Safety Precautions...........................................................................................................8
1.2.1 Safety Procedures and Precautions.............................................................................8
2 Specifications...........................................................................................................................10
2.1 Controller .......................................................................................................................10
2.2 Sensors..........................................................................................................................12
2.3 Controller Display Messages.........................................................................................16
3 Feature and Control Locations................................................................................................18
4 Typical Applications for the Series 937B Controller................................................................20
5 HPS

Products Series 937B Multi-Sensor High Vacuum System ..........................................21
6 Operating the Series 937B Controller .....................................................................................23
6.1 Power.............................................................................................................................23
6.2 Front Panel Control Lock...............................................................................................23
6.3 Front Panel Display .......................................................................................................23
6.3.1 Standard front panel display.......................................................................................23
6.3.2 Large font displays .....................................................................................................25
6.4 System Setup.................................................................................................................25
6.4.1 Overview of 937B System setup ................................................................................25
6.4.2 Display system setup parameters ..............................................................................26
6.4.3 Change and save a parameter value .........................................................................27
6.4.4 Description of the system setup parameters..............................................................28
6.5 Channel Setup for Pressure Measurement ...................................................................31
6.5.1 Overview of 937B Channel setup...............................................................................31
6.5.2 Setup for a Capacitance Manometer..........................................................................33
6.5.3 Setup for a PR (Pirani)/CP (convection Pirani) sensor ..............................................36
6.5.4 Setup a Cold Cathode Sensor....................................................................................39
6.5.5 Setup a Hot Cathode Sensor .....................................................................................41
6.6 Power Control of a Pres
sure Sensor.............................................................................45
6.6.1 Power (including degas) control of a sensor using front panel control button ...........45
6.6.2 Power (including degas) control of a sensor via 37 pin AIO Dsub connector............46
6.6.3 Power (including degas) control of a sensor using Serial communication commands.
46
6.7 Leak Test Using the 937B Controller.............................................................................47
6.7.1 Leak test principle applied for the 937B.....................................................................47
6.7.2 Procedures for a leak test with the 937B....................................................................47
6.8 Channel Setup for Flow Measurement and Control ......................................................49
6.8.1 Setup of a single MFC for flow or pressure control ....................................................49
6.8.2 Set MFCs for ratio flow and pressure control.............................................................57
6.9 Pressure control using a control valve...........................................................................59
6.9.1 Valve selection ...........................................................................................................59
6.9.2 Valve control mode.....................................................................................................60
7 Installing Vacuum Sensors......................................................................................................61
7.1 Installing cold cathode sensors......................................................................................61
7.1.1 Locating a Cold Cathode Sensor ...............................................................................61
7.1.2 Orienting a Cold Cathode Sensor ..............................................................................61
7.1.3 Managing Contamination in a Cold Cathode Sensor.................................................61
7.1.4 Connecting the Series 421/422 Sensor
......................................................................61
7.1.5 Connecting the 423 I-MAG Sensor ............................................................................62