MKS 937B - Power (Including Degas) Control of a Sensor Via 37 Pin AIO Dsub Connector; Power (Including Degas) Control of a Sensor Using Serial Communication Commands; Table 6-3 Pin out for Ion Gauge Remote Control

MKS 937B Operation Manual
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6.6.2 Power (including degas) control of a sensor via 37 pin AIO Dsub
connector
A connected pressure sensor can also be turned on/off by sending a control signal to pin 15 to 20 on
the 37pin Dsub connector located on the back of the AIO module as shown in Table 6-3.
To turn off a sensor, pull the pin to the ground. The sensor power is turned off when a microprocessor
detects a falling edge on the input pin, and this turned on the sensor power when a rising edge is
detected.
Since only one hot cathode gauge can be connected to the board, pin 16, 18, 20 are used to control
the filament degas power.
Description Pin Description
1 Buffered Aout A1 11 Log/Lin Aout C1
2 Buffered Aout A2 12 Log/Lin Aout C2
3 Buffered Aout B1 13 Combination Aout 1
4 Buffered Aout B2 14 Combination Aout 2
5 Buffered Aout C1 15 Power A1
6 Buffered Aout C2 16 Power A2/Degas A1
7 Log/Lin Aout A1 17 Power B1
8 Log/Lin Aout A2 18 Power B2/Degas B1
9 Log/Lin Aout B1 19 Power C1
10 Log/Lin Aout B2 20 Power C2/Degas C1
21 to 37 Ground
Table 6-3 Pin out for ion gauge remote control.
Control pins 15-20 are pulled up by internal circuit, therefore, there is no external
voltage source required to pull up the pin.
6.6.3 Power (including degas) control of a sensor using Serial
communication commands.
The following serial communication command turns on/off the channel power for a sensor
(PR/CP/CC/HC) connected to 937B remotely.
@254CPn!ON;FF
Here, n=1 to 6, which is corresponding to the gauge connected to channels A1, A2, B1, B1,
C1 and C2, respectively.
The corresponding response that the command has been sent successfully is
@002ACKON;FF
To turn off an ion gauge, enter the following command:
@254CPn!OFF;FF
The expected response is as follows: