MKS 937B - Table 8-8 Buffered Analog Output for the 317 Convection Pirani Sensor

MKS 937B Operation Manual
80
Pressure, Torr Buffered N
2
Vout, V Buffered Ar Vout, V Buffered He Vout, V
1.0E-04 0.5639 0.5674 0.5654
1.5E-04 0.5650 0.5680 0.5663
2.0E-04 0.5660 0.5687 0.5671
3.0E-04 0.5681 0.5699 0.5688
4.0E-04 0.5702 0.5712 0.5705
6.0E-04 0.5744 0.5737 0.5738
8.0E-04 0.5785 0.5762 0.5771
1.0E-03 0.5825 0.5787 0.5803
1.5E-03 0.5925 0.5849 0.5883
2.0E-03 0.6023 0.5909 0.5961
3.0E-03 0.6213 0.6029 0.6114
4.0E-03 0.6397 0.6147 0.6262
6.0E-03 0.6748 0.6375 0.6547
8.0E-03 0.7081 0.6594 0.6818
1.0E-02 0.7397 0.6807 0.7077
1.5E-02 0.8130 0.7309 0.7685
2.0E-02 0.8799 0.7778 0.8244
3.0E-02 0.9993 0.8635 0.9256
4.0E-02 1.1050 0.9410 1.0161
6.0E-02 1.2884 1.0782 1.1755
8.0E-02 1.4465 1.1985 1.3147
1.0E-01 1.5870 1.3066 1.4398
1.5E-01 1.8866 1.5399 1.7110
2.0E-01 2.1371 1.7370 1.9427
3.0E-01 2.5480 2.0637 2.3341
4.0E-01 2.8825 2.3318 2.6645
6.0E-01 3.4139 2.7612 3.2168
8.0E-01 3.8301 3.1003 3.6784
1.0E+00 4.1716 3.3801 4.0811
1.5E+00 4.8207 3.9161 4.9231
2.0E+00 5.2897 4.3067 5.6142
3.0E+00 5.9352 4.8489 6.7300
4.0E+00 6.3647 5.2126 7.6243
6.0E+00 6.9069 5.6749 9.0227
8.0E+00 7.2375 5.9585 10.0998
1.0E+01 7.4611 6.1510 10.9720
1.5E+01 7.7955 6.4399
2.0E+01 7.9814 6.6008
3.0E+01 8.1820 6.7747
4.0E+01 8.2885 6.8671
6.0E+01 8.3954 6.9637
8.0E+01 8.4563 7.0109
1.0E+02 8.4917 7.0396
1.5E+02 8.5547 7.0943
2.0E+02 8.6178 7.1523
3.0E+02 8.7804 7.3037
4.0E+02 9.0106 7.5176
6.0E+02 9.3827 7.8191
8.0E+02 9.6467 8.0330
1.0E+03 9.8515 8.1989
Table 8-8 Buffered analog output for the 317 Convection Pirani sensor.