MKS 937B - Table 8-7 Equations for the 315;345 Pirani Sensors

MKS 937B Operation Manual
78
Range Equation
Nitrogen
0.63<V<9.3 V
1  10
-4
<p <20 torr
007.1
2
1
3935.0
303.93
585.1















V
p
9.3 V< V <9.72 V
20 <p< 1  10
3
torr

8696.0
3
2
1034.1621.9621.94123








VVp
Argon
0.63<V<7.79 V
1  10
-4
<p<20 torr
1
3961.0
63.63
663.1
2



V
p
7.79 V< V <8.05 V
30 <p< 1  10
3
torr

729.0
4
2
10464.59386.79386.72959








VVp
Helium
0.63<V<10 V
1  10
-4
<3 torr
1
3965.0
4.509
287.9
2



V
p
Table 8-7 Equations for the 315/345 Pirani sensors.