MKS 937B - Pressure Reading Commands; Table 10-6 937 A Pressure Reading Serial Commands

MKS 937B Operation Manual
99
10.3 Pressure reading commands
Command Function Response Meaning
Read Single Channel pressure
d.dEee
dEee
(d,e=0 to 9)
Pressure in selected units (dEee, with 2
leading spaces, in single digit resolution regions
only)
HI>Eee
Above range of 10

ee
AA_ Eee
At atmosphere (Pirani only, >400 torr, or
equivalent)
LO<Eee
Below range of 10

ee
LO
CC below range, not stared, or in roll-back
HV_OFF!
Cold cathode HV power off
WAIT
CC startup delay
CONTROL!
CC in controlled state
NEGATIV!
CM reading below zero pressure
NOGAUGE!
No sensor on channel
Pn
(n=1 to 5)
Read pressure
on Channel n
MISCONN!
Sensor improperly connected, or broken
filament (PR, CP only)
PZ
Read pressure
on all channel
5 of above,
separated by
spaces,
ending with
<cr>
Same as above, First 4 responses are padded
with spaces to make a total of 9 characters
each. Channel n response starts with character
number 9n-8
Read combination pressure
d.dEee
dEee
(d,e=0 to 9)
Pressure in selected units
HI
Above combined range
LO
Below combined range
NOGAUGE!
Sensor missing/misconnected
Cn
(n=1, 2)
Read pressure
on channel n and
its combination
sensor
Disabled!
No ion gauge is assigned to the channel.
Table 10-6 937A pressure reading serial commands.